Switching spectroscopy piezoresponse force microscopy of polycrystalline capacitor structures

被引:52
作者
Bintachitt, Patamas [1 ,2 ]
Trolier-McKinstry, Susan [1 ,2 ]
Seal, Katyayani [3 ]
Jesse, Stephen [3 ]
Kalinin, Sergei V. [3 ]
机构
[1] Penn State Univ, Dept Mat Sci & Engn, University Pk, PA 16802 USA
[2] Penn State Univ, Mat Res Inst, University Pk, PA 16802 USA
[3] Oak Ridge Natl Lab, Ctr Nanophase Mat Sci, Oak Ridge, TN 37831 USA
关键词
dielectric hysteresis; ferroelectric switching; ferroelectric thin films; lead compounds; MIM structures; zirconium compounds; THIN-FILMS;
D O I
10.1063/1.3070543
中图分类号
O59 [应用物理学];
学科分类号
摘要
Polarization switching in polycrystalline PbZr0.52Ti0.48O3 films on Pt-coated Si substrates was studied by switching spectroscopy piezoresponse force microscopy (SSPFM). Acquisition of multiple hysteresis loops allows polarization switching parameters, including nucleation, coercive biases, and switchable response to be mapped in real space. In contrast to measurements made on the free surface, those on the metal-ferroelectric-metal capacitor structures show the evolution of correlated switching of 10(2)-10(3) grain clusters with well-defined imprint and nucleation biases. The role of substrate bending on clustering and SSPFM detection mechanisms are discussed. These studies demonstrate real-space imaging of mesoscopic polarization reversal in real-world devices.
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页数:3
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