Towards a nanostructured thermoelectric generator using ion-track lithography

被引：23

作者：

Koukharenko, E. ^{[1
]}

Li, X. ^{[2
]}

Nandhakumar, I. ^{[2
]}

Frety, N. ^{[3
]}

Beeby, S. P. ^{[1
]}

Cox, D. ^{[4
]}

Tudor, M. J. ^{[1
]}

Schiedt, B. ^{[5
]}

Trautmann, C.

Bertsch, A. ^{[6
]}

White, N. M. ^{[1
]}

机构：

[1] Univ Southampton, Southampton, Hants, England

[2] Sch Chem, Southampton, Hants, England

[3] Univ Montpellier 2, Inst Charles Gerhardt, Equipe PMOF, F-34095 Montpellier 5, France

[4] Univ Surrey, Adv Technol Inst, Guildford GU2 5XH, Surrey, England

[5] GSI Darmstadt, D-6100 Darmstadt, Germany

[6] Ecole Polytech Fed Lausanne, FSTI LMIS4 Lausanne, CH-1015 Lausanne, Switzerland

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2008年 / 18卷 / 10期

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

10.1088/0960-1317/18/10/104015

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the process development towards a new generation of nanostructured thermoelectric generators for power harvesting from small temperature gradients by using a combination of traditional silicon microfabrication techniques, electroplating and submicron ion-track nanolithography. Polyimide nanotemplates with pore diameters ranging from 30 nm to 120 nm were fabricated. Preliminary results from the fabrication of poly(methyl methacrylate) (PMMA)-nanostructured templates are reported. Bi2Te3 nanowires (80 and 120 nm diameters) were electroplated into polyimide ion-track nanotemplates. Bi2Te3 nanowires of a R3 m structure, with preferential orientation in (1 1 0) crystallographic plans, were electroplated. The chemical composition of Bi2Te3 with nearly stoichiometric composition (Bi2.31Te3) was obtained. Homogeneity profiles of the chemical composition were obtained. A fine-grained observed microstructure (6-10 nm) and (1 1 0) crystalline orientation were obtained, which is extremely promising for improving the thermoelectric material properties. The thermoelectric properties of the Bi2Te3-electroplated thin films (Seebeck coefficient a) and electrical resistivity of the Bi2Te3 bundle nanowires were found to be - 52 mu V K-1 and similar to 14 M Omega cm, respectively. Polyimide (Kapton foil) and PMMA 950 photoresists were promising materials for the realization of a nanostructured thermoelectric generator on flexible and rigid substrates, respectively.

引用

页数：9

共 46 条

[1] Ion beam lithography using single ions [J].