A New Aspect of Time-dependent Clustering Model for Non-uniform Dielectric TDDB

被引:0
|
作者
Shimizu, T. [1 ]
Suzumura, N. [1 ]
Ohgata, K. [1 ]
Tsuchiya, H. [1 ]
Aono, H. [1 ]
Ogasawara, M. [1 ]
机构
[1] Renesas Elect Corp, Adv Device Dev Dept, Hitachinaka, Ibaraki, Japan
关键词
time-dependent dielectric breakdown (TDDB); defect clustering; non-uniform dielectric breakdown; variability; extreme value statistics; compound Weibull distribution; K DIELECTRICS; RELIABILITY; BREAKDOWN; METHODOLOGY; TECHNOLOGY; PREDICTION; IMPACT; DEFECT;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We investigated the time-dependent clustering (TDC) model for time-dependent dielectric breakdown (TDDB) of non-uniform dielectrics and revealed for the first time that the TDC model is a compound Weibull model that is expressed as a superposition of Weibull distributions. The Weibull model has two statistical parameters, scale parameter eta and shape parameter beta. We clarified the precondition that the TDC model holds when term eta(B) of the Weibull model is distributed according to an inverse-gamma distribution. By using our finding, we proposed a new method to directly estimate the variations of electric field and effective space from TDDB data. We found that the corresponding electric field distribution is a generalization of extreme value distribution, which is a natural consequence since the lifetime is determined by the maximum value of the electric field.
引用
收藏
页数:10
相关论文
共 50 条
  • [1] A Time-Dependent Clustering Model for Non-Uniform Dielectric Breakdown
    Wu, E.
    Li, B.
    Stathis, J. H.
    Achanta, R.
    Filippi, R.
    McLaughlin, P.
    2013 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2013,
  • [2] Modeling of time-dependent non-uniform dielectric breakdown using a clustering statistical approach
    Wu, Ernest Y.
    Li, Baozhen
    Stathis, James H.
    APPLIED PHYSICS LETTERS, 2013, 103 (15)
  • [3] Numerical Simulation of Percolation Model for Time Dependent Dielectric Breakdown (TDDB) under Non-uniform Trap Distribution
    Choi, Seongwook
    Park, Young June
    2015 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES (SISPAD), 2015, : 405 - 408
  • [4] Analysis of applying time-dependent clustering model to BEOL TDDB
    Achanta, Ravi
    Wu, Ernest
    Li, Baozhen
    McLaughlin, Paul
    2014 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE / ADVANCED METALLIZATION CONFERENCE (IITC/AMC), 2014, : 219 - 221
  • [5] Time-Dependent Clustering Model versus Combination-Based Approach for BEOL/MOL and FEOL Non-Uniform Dielectric Breakdown: Similarities and Disparities
    Wu, Ernest Y.
    Li, Baozhen
    Stathis, James H.
    LaRow, Charles
    2014 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, 2014,
  • [6] Physical model for the frequency dependence of time-dependent dielectric breakdown (TDDB)
    McPherson, J. W.
    AIP ADVANCES, 2023, 13 (05)
  • [7] DISPERSION OF A NON-UNIFORM SLUG IN TIME-DEPENDENT FLOW
    GILL, WN
    SANKARASUBRAMANIAN, R
    PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1971, 322 (1548) : 101 - +
  • [8] TIME-DEPENDENT NON-UNIFORM GRIDS FOR PARABOLIC EQUATIONS
    ORLANDI, P
    LECTURE NOTES IN PHYSICS, 1985, 218 : 437 - 441
  • [9] Time-Dependent Shape Factors for Uniform and Non-Uniform Pressure Boundary Conditions
    Rangel-German, Edgar R.
    Kovscek, Anthony R.
    Akin, Serhat
    TRANSPORT IN POROUS MEDIA, 2010, 83 (03) : 591 - 601
  • [10] Time-Dependent Shape Factors for Uniform and Non-Uniform Pressure Boundary Conditions
    Edgar R. Rangel-German
    Anthony R. Kovscek
    Serhat Akin
    Transport in Porous Media, 2010, 83 : 591 - 601