Degradable fluorosurfactants in the semiconductor and electronics industries

Degradable and low/non-foaming fluorosurfactants are discussed as possible alternatives to existing fluorosurfactants with longer atmospheric lifetimes. Degradation monitors were used to determine the half-lives of the alternative surfactants and degradation products. Fluorosurfactants containing alpha-branched carboxylates exhibit half-lives that are significantly shorter from that of the straight chain sulfate based isomers. Alternative fluorosurfactants exhibiting shorter half-lives can be valuable materials that help the semiconductor industry reach the ES&H objectives outlined in the National Technology Roadmap for Semiconductors (NTRS).