Effects of hole self-trapping by polarons on transport and negative bias illumination stress in amorphous-IGZO

被引:13
作者
de Meux, A. de Jamblinne [1 ,2 ]
Pourtois, G. [2 ,3 ]
Genoe, J. [1 ,2 ]
Heremans, P. [1 ,2 ]
机构
[1] Katholieke Univ Leuven, ESAT, B-3001 Leuven, Belgium
[2] IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
[3] Univ Antwerp, Plasmant Res Grp, Dept Chem, B-2610 Antwerp, Belgium
关键词
SPACE GAUSSIAN PSEUDOPOTENTIALS; MINIMUM ENERGY PATHS; ELASTIC BAND METHOD; ELECTRONIC-STRUCTURE; OXIDE SEMICONDUCTOR; SADDLE-POINTS; ORIGINS; OXYGEN;
D O I
10.1063/1.4986180
中图分类号
O59 [应用物理学];
学科分类号
摘要
The effects of hole injection in amorphous indium-gallium-zinc-oxide (a-IGZO) are analyzed by means of first-principles calculations. The injection of holes in the valence band tail states leads to their capture as a polaron, with high self-trapping energies (from 0.44 to 1.15 eV). Once formed, they mediate the formation of peroxides and remain localized close to the hole injection source due to the presence of a large diffusion energy barrier (of at least 0.6 eV). Their diffusion mechanism can be mediated by the presence of hydrogen. The capture of these holes is correlated with the low off-current observed for a-IGZO transistors, as well as with the difficulty to obtain a p-type conductivity. The results further support the formation of peroxides as being the root cause of Negative Bias Illumination Stress (NBIS). The strong self-trapping substantially reduces the injection of holes from the contact and limits the creation of peroxides from a direct hole injection. In the presence of light, the concentration of holes substantially rises and mediates the creation of peroxides, responsible for NBIS. Published by AIP Publishing.
引用
收藏
页数:7
相关论文
共 45 条
[1]   THE CRYSTAL STRUCTURE OF HYDROGEN PEROXIDE [J].
ABRAHAMS, SC ;
COLLIN, RL ;
LIPSCOMB, WN .
ACTA CRYSTALLOGRAPHICA, 1951, 4 (01) :15-20
[2]   Temperature dependence of negative bias under illumination stress and recovery in amorphous indium gallium zinc oxide thin film transistors [J].
Chowdhury, Md Delwar Hossain ;
Migliorato, Piero ;
Jang, Jin .
APPLIED PHYSICS LETTERS, 2013, 102 (14)
[3]   Origin of the apparent delocalization of the conduction band in a high-mobility amorphous semiconductor [J].
de Meux, A. de Jamblinne ;
Pourtois, G. ;
Genoe, J. ;
Heremans, P. .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2017, 29 (25)
[4]   Comparison of the electronic structure of amorphous versus crystalline indium gallium zinc oxide semiconductor: structure, tail states and strain effects [J].
de Meux, A. de Jamblinne ;
Pourtois, G. ;
Genoe, J. ;
Heremans, P. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2015, 48 (43)
[5]   Oxygen vacancies effects in a-IGZO: Formation mechanisms, hysteresis, and negative bias stress effects [J].
de Meux, Albert de Jamblinne ;
Bhoolokam, Ajay ;
Pourtois, Geoffrey ;
Genoe, Jan ;
Heremans, Paul .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2017, 214 (06)
[6]   Separable dual-space Gaussian pseudopotentials [J].
Goedecker, S ;
Teter, M ;
Hutter, J .
PHYSICAL REVIEW B, 1996, 54 (03) :1703-1710
[7]   Auxiliary Density Matrix Methods for Hartree-Fock Exchange Calculations [J].
Guidon, Manuel ;
Hutter, Jurg ;
VandeVondele, Joost .
JOURNAL OF CHEMICAL THEORY AND COMPUTATION, 2010, 6 (08) :2348-2364
[8]   Robust Periodic Hartree-Fock Exchange for Large-Scale Simulations Using Gaussian Basis Sets [J].
Guidon, Manuel ;
Hutter, Juerg ;
VandeVondele, Joost .
JOURNAL OF CHEMICAL THEORY AND COMPUTATION, 2009, 5 (11) :3010-3021
[9]   GAS-PHASE STRUCTURE OF DIMETHYL PEROXIDE [J].
HAAS, B ;
OBERHAMMER, H .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1984, 106 (21) :6146-6149
[10]   Electronic Structure of Oxygen Interstitial Defects in Amorphous In-Ga-Zn-O Semiconductors and Implications for Device Behavior [J].
Han, W. H. ;
Oh, Young Jun ;
Chang, K. J. ;
Park, Ji-Sang .
PHYSICAL REVIEW APPLIED, 2015, 3 (04)