Nanostructure of carbon dust generated in plasmas of different parameters

被引:0
|
作者
Arnas, C. [1 ]
Mouberi, A. [1 ]
Hassouni, K. [2 ]
Michaud, A. [2 ]
Benedic, F. [2 ]
Lombardi, G. [2 ]
Bonnin, X. [2 ]
机构
[1] Univ Aix Marseille 1, UMR CNRS 6633, Lab Phys Interact Ion & Mol, Case 232, F-13397 Marseille 20, France
[2] Univ Paris 13, CNRS, Lab Ingn Mat & Hautes Press, UPR 1311, F-93430 Villetaneuse, France
来源
MULTIFACETS OF DUSTY PLASMA | 2008年 / 1041卷
关键词
nanoparticle; carbon; dusty plasma;
D O I
暂无
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Carbon nanoparticles are produced in supersaturated carbon vapors of sputtering discharges as well as front complex reactions between hydrocarbon radicals in Ar/CH4/H-2 microwave discharges. A summary of their formation is reported. Despite different molecular precursors, it is shown that they can exhibit similar carbon concentric microtexture. Correlations are established between the final nanoparticle solid state and the heating mechanisms which are characteristic of each discharge.
引用
收藏
页码:33 / +
页数:2
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