Room-Temperature H2 Gas Sensing Characterization of Graphene-Doped Porous Silicon via a Facile Solution Dropping Method

被引:20
作者
Eom, Nu Si A. [1 ]
Cho, Hong-Baek [1 ]
Song, Yoseb [1 ]
Lee, Woojin [2 ]
Sekino, Tohru [3 ]
Choa, Yong-Ho [1 ]
机构
[1] Hanyang Univ, Dept Fus Chem Engn, Ansan 15588, South Korea
[2] Samsung Elect Co Ltd, Semicond R&D Ctr, Proc Dev Team, Samsungjeonja Ro 1, Hwaseong 445330, Gyeonggi Do, South Korea
[3] Osaka Univ, Inst Sci & Ind Res, 8-1 Mihogaoka, Ibaraki, Osaka 5670047, Japan
基金
新加坡国家研究基金会;
关键词
graphene-doped porous silicon; p-type silicon; hydrogen sensor; sensing mechanism; SENSOR;
D O I
10.3390/s17122750
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
In this study, a graphene-doped porous silicon (G-doped/p-Si) substrate for low ppm H-2 gas detection by an inexpensive synthesis route was proposed as a potential noble graphene-based gas sensor material, and to understand the sensing mechanism. The G-doped/p-Si gas sensor was synthesized by a simple capillary force-assisted solution dropping method on p-Si substrates, whose porosity was generated through an electrochemical etching process. G-doped/p-Si was fabricated with various graphene concentrations and exploited as a H-2 sensor that was operated at room temperature. The sensing mechanism of the sensor with/without graphene decoration on p-Si was proposed to elucidate the synergetic gas sensing effect that is generated from the interface between the graphene and p-type silicon.
引用
收藏
页数:7
相关论文
共 22 条
  • [1] Hydrogen sensor based on graphene/ZnO nanocomposite
    Anand, Kanika
    Singh, Onkar
    Singh, Manmeet Pal
    Kaur, Jasmeet
    Singh, Ravi Chand
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2014, 195 : 409 - 415
  • [2] Localized aerosol-assisted CVD of nanomaterials for the fabrication of monolithic gas sensor microarrays
    Annanouch, F. E.
    Gracia, I.
    Figueras, E.
    Llobet, E.
    Cane, C.
    Vallejos, S.
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2015, 216 : 374 - 383
  • [3] Multi layered Nanoarchitecture of Graphene Nanosheets and Polypyrrole Nanowires for High Performance Supercapacitor Electrodes
    Biswas, Sanjib
    Drzal, Lawrence T.
    [J]. CHEMISTRY OF MATERIALS, 2010, 22 (20) : 5667 - 5671
  • [4] Capone S, 2003, J OPTOELECTRON ADV M, V5, P1335
  • [5] Metal-assisted etching of p-type silicon under anodic polarization in HF solution with and without H2O2
    Chourou, Mohamed L.
    Fukami, Kazuhiro
    Sakka, Tetsuo
    Virtanen, Sannakaisa
    Ogata, Yukio H.
    [J]. ELECTROCHIMICA ACTA, 2010, 55 (03) : 903 - 912
  • [6] Emtsev KV, 2009, NAT MATER, V8, P203, DOI [10.1038/NMAT2382, 10.1038/nmat2382]
  • [7] A low temperature hydrogen sensor based on palladium nanoparticles
    Gupta, D.
    Dutta, D.
    Kumar, M.
    Barman, P. B.
    Sarkar, C. K.
    Basu, S.
    Hazra, S. K.
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2014, 196 : 215 - 222
  • [8] KIM JM, 2014, SCI REP, V4
  • [9] Nanotube molecular wires as chemical sensors
    Kong, J
    Franklin, NR
    Zhou, CW
    Chapline, MG
    Peng, S
    Cho, KJ
    Dai, HJ
    [J]. SCIENCE, 2000, 287 (5453) : 622 - 625
  • [10] Korotcenkov G. S., 2013, Handbook of Gas Sensor Materials: Properties, Advantages and Shortcomings for Applications. Conventional Approaches