X-ray excited spectroscopy of defects and impurities in compound semiconductors
被引:1
作者:
Takeda, Y
论文数: 0引用数: 0
h-index: 0
机构:
Nagoya Univ, Dept Mat Sci & Engn, Grad Sch Engn, Nagoya, Aichi 4648603, JapanNagoya Univ, Dept Mat Sci & Engn, Grad Sch Engn, Nagoya, Aichi 4648603, Japan
Takeda, Y
[1
]
机构:
[1] Nagoya Univ, Dept Mat Sci & Engn, Grad Sch Engn, Nagoya, Aichi 4648603, Japan
[2] Nagoya Univ, Venture Business Lab, Nagoya, Aichi 4648603, Japan
XAFS;
impurity;
local structure;
fluorescence X-ray;
photoluminescence;
capacitance;
D O I:
10.1016/j.mssp.2003.07.001
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
Analysis of local structures around impurities and defects in compound semiconductors and insulator by X-ray excited spectroscopy, namely, XAFS with fluorescence X-ray detection technique (fluorescence-XAFS) and with photoluminescence detection technique (PL-XAFS), is presented. Those two techniques that use the surface incidence and surface detection are essentially important for samples with a thin epitaxial layer, where the impurities and defects exist, grown on a thick substrate. Er in InP, Er and O in GaAs, Tb in SiO2 and DX-center in GaAs are taken as examples and local structures around these impurities are elucidated. (C) 2003 Elsevier Ltd. All rights reserved.
机构:
Soochow Univ, Inst Funct Nano & Soft Mat FUNSOM, Suzhou 215123, Jiangsu, Peoples R China
Soochow Univ, Soochow Univ Western Univ Ctr Synchrotron Radiat, Suzhou 215123, Jiangsu, Peoples R ChinaDESY Deutsch Elektronen Synchrotron, D-22607 Hamburg, Germany
Liu, L.
Hu, Y.
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h-index: 0
机构:
Univ Saskatchewan, Canadian Light Source, Saskatoon, SK S7N2V3, CanadaDESY Deutsch Elektronen Synchrotron, D-22607 Hamburg, Germany
Hu, Y.
Zapien, J. A.
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机构:
City Univ Hong Kong, Ctr Super Diamond & Adv Films COSDAF, Hong Kong, Hong Kong, Peoples R China
City Univ Hong Kong, Dept Phys & Mat Sci, Hong Kong, Hong Kong, Peoples R ChinaDESY Deutsch Elektronen Synchrotron, D-22607 Hamburg, Germany
机构:
Univ Calif San Diego, Dept Nanoengn, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Nanoengn, La Jolla, CA 92093 USA
Dolan, Connor J.
Cakan, Deniz N.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Dept Nanoengn, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Nanoengn, La Jolla, CA 92093 USA
Cakan, Deniz N.
Kumar, Rishi E.
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h-index: 0
机构:
Univ Calif San Diego, Dept Mat Sci & Engn, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Nanoengn, La Jolla, CA 92093 USA
Kumar, Rishi E.
Kodur, Moses
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机构:
Univ Calif San Diego, Dept Chem Engn, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Nanoengn, La Jolla, CA 92093 USA
Kodur, Moses
Palmer, Jack R.
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h-index: 0
机构:
Univ Calif San Diego, Dept Mat Sci & Engn, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Nanoengn, La Jolla, CA 92093 USA
Palmer, Jack R.
Luo, Yanqi
论文数: 0引用数: 0
h-index: 0
机构:
Argonne Natl Lab, Lemont, IL 60439 USAUniv Calif San Diego, Dept Nanoengn, La Jolla, CA 92093 USA
Luo, Yanqi
Lai, Barry
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机构:
Argonne Natl Lab, Lemont, IL 60439 USAUniv Calif San Diego, Dept Nanoengn, La Jolla, CA 92093 USA
Lai, Barry
Fenning, David P.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif San Diego, Dept Nanoengn, La Jolla, CA 92093 USA
Univ Calif San Diego, Dept Mat Sci & Engn, La Jolla, CA 92093 USA
Univ Calif San Diego, Dept Chem Engn, La Jolla, CA 92093 USAUniv Calif San Diego, Dept Nanoengn, La Jolla, CA 92093 USA