Very low complexity RF-MEMS technology for wide range tunable microwave filters

被引：0
|
作者：
Siegel, C. [1 ]
Ziegler, V. [1 ]
Prechtel, U. [1 ]
Schoenlinner, B. [1 ]
Schumacher, H. [1 ]
机构：
[1] EADS Deutschland GmbH, Corp Res Ctr, LG ME, D-81663 Munich, Germany
来源：
35th European Microwave Conference, Vols 1-3, Conference Proceedings | 2005年
关键词：
RF MEMS; rolling stubs; stress; aluminum; tunable filter; microwave;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents tunable microstrip filters in the GHz range, fabricated on silicon in a very low complexity RF-MEMS process with only one metallization layer. Affected by a mechanic stress gradient in the metallization, free standing parts of the structure roll up. These bended beams can be switched onto the substrate by electrostatic actuation and thus tune the resonance frequency by changing the epsilon(r) (eff) of the resonant structure. The technology offers the possibility to realize tunable filters with a small insertion loss of less then 1.5 dB at 30 GHz for bandpass and for bandstop filters and a large frequency shift of about 20% in operation frequency.
引用
收藏
页码：637 / 640
页数：4
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