Design and control of a positioning system for robot-based nanometrology

被引：10

作者：

Thier, Markus ^{[1
]}

Saathof, Rudolf ^{[1
]}

Csencsics, Ernst ^{[1
]}

Hainisch, Reinhard ^{[1
]}

Sinn, Andreas ^{[1
]}

Schitter, Georg ^{[1
]}

机构：

[1] Vienna Univ Technol, Inst Automatisierungs & Regelungstech ACIN, A-1060 Vienna, Austria

来源：

AT-AUTOMATISIERUNGSTECHNIK | 2015年 / 63卷 / 09期

关键词：

In-process measurement; precision positioning; precision measurement; instrumentation;

D O I：

10.1515/auto-2015-0044

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Mechanical vibrations occuring in a production environment cause a relative motion between the sample and inspection tool that distorts measurements at the nanometcr level. To overcome this problem, this paper proposes a metrology platform that maintains a constant relative distance to the sample by means of an Hoofeedback controller. Experiments in one degree of freedom show that the metrology platform can reduce vibrations as they occur in a production environment by one order of magnitude. Therefore, it enables in-line surface metrology at the nanometcr level.

引用

页码：727 / 738

页数：12

共 20 条

[1]

[Anonymous], 2003, Passive vibration isolation

[2] Static analysis of a passive vibration isolator with quasi-zero-stiffness characteristic [J].

Carrella, A. ;

Brennan, M. J. ;

Waters, T. P. .

JOURNAL OF SOUND AND VIBRATION, 2007, 301 (3-5) :678-689

[3]

Deng R., 2014, 22 INT C MAGLEV 28 S

[4]

Franklin G., 1997, Digital Control of Dynamic Systems

[5]

Howell L, 2001, HDB COMPLIANT MECH

[6]

Jabben L., 2007, THESIS DELFT U TECHN

[7] Magnetic force driven six degree-of-freedom active vibration isolation system using a phase compensated velocity sensor [J].

Kim, Yongdae ;

Kim, Sangyoo ;

Park, Kyihwan .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2009, 80 (04)

[8] ROBUST-CONTROL AND H-INFINITY-OPTIMIZATION - TUTORIAL PAPER [J].

KWAKERNAAK, H .

AUTOMATICA, 1993, 29 (02) :255-273

[9]

Leach RK, 2010, FUNDAMENTAL PRINCIPLES OF ENGINEERING NANOMETROLOGY, P1

[10] Digital lock-in detection for discriminating multiple modulation frequencies with high accuracy and computational efficiency [J].

Masciotti, James M. ;

Lasker, Joseph M. ;

Hiescher, Andreas H. .

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2008, 57 (01) :182-189

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