Applying composition control to improve the mechanical and thermal properties of Zr-Cu-Ni-Al thin film metallic glass by magnetron DC sputtering

被引:17
|
作者
Lee, Joseph [1 ]
Huang, Kuo-Hua [1 ]
Hsu, Kai-Chieh [1 ]
Tung, Huan-Chien [2 ]
Lee, Jyh-Wei [3 ]
Duh, Jenq-Gong [1 ]
机构
[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu, Taiwan
[2] China Steel Corp, New Mat Res & Dev Dept, Kaohsiung, Taiwan
[3] Ming Chi Univ Technol, Dept Mat Engn, Taipei, Taiwan
关键词
Magnetron sputtering; Thin film metallic glass; Composition control; RESISTANCE;
D O I
10.1016/j.surfcoat.2015.07.015
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
This study is intended to investigate the amorphicity region of Ni + Al content in Zr-Cu-Ni-Al thin film. The thermal and mechanical performances of Zr-Cu-Ni-Al thin film metallic glass (TFMG) are also addressed. By adjusting target power, thin film metallic glass with various (Zr + Cu)/(Ni + Al) ratio were fabricated. The composition of the Zr-Cu-Ni-Al thin films was analyzed by field emission electron probe micro-analyzer (FE-EPMA). Via Grazing Angle X-Ray Diffractometer (GIXRD), all Zr-Cu-Ni-Al thin films show the hump peak, implying the amorphous feature. To further identify the amorphous characteristic, a differential scanning calorimetry (DSC) is used and the amorphicity region of (Ni + Al) in Zr-Cu-Ni-Al thin film is as wide as 54 at.%. Besides, the glass transition temperature Tg, for all Zr-Cu-Ni-Al TFMGs are above 700 K, and the Delta T ranges from 50 K to 70 K. With the aid of nano-indention, hardness and elastic modulus were measured in which the hardness reaches 7.5 GPa for Zr23Cu23Ni27Al27 TFMG. The value of Delta T increases with (Ni + Al) contents in Zr-Cu-Ni-Al TFMG across the whole amorphous region, indicating that the thermal stability is improved and higher hardness is thus achieved. For a better intrinsic viewpoint, the average interatomic distance is calculated. The calculated distance gets closer with Ni + Al content, which might result from the increase of short range order (SRO) structure with good thermal stability. From the positive correlation of elastic modulus and Ni + Al content, the improved hardness is explained in the viewpoint of energy. In summary, the thermal and mechanical performances of Zr-Cu-Ni-Al TFMG with 54 at.% (Ni + Al) content are among the best in the class of Zr-Cu-Ni-Al metallic glass, implying that Zr-Cu-Ni-Al TFMG with improved performance can be fabricated in lower cost. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:132 / 137
页数:6
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