Micro-supercapacitors from carbide derived carbon (CDC) films on silicon chips

被引：129

作者：

Huang, Peihua ^{[1
,2
,3
]}

Heon, Min ^{[5
,6
]}

Pech, David ^{[1
,2
]}

Brunet, Magali ^{[1
,2
]}

Taberna, Pierre-Louis ^{[3
,4
]}

Gogotsi, Yury ^{[5
,6
]}

Lofland, Samuel ^{[7
]}

Hettinger, Jeffrey D. ^{[7
]}

Simon, Patrice ^{[3
,4
]}

机构：

[1] CNRS, LAAS, F-31400 Toulouse, France

[2] Univ Toulouse, LAAS, F-31400 Toulouse, France

[3] Univ Toulouse 3, CNRS, CIRIMAT, UMR 5085, F-31062 Toulouse 4, France

[4] FR CNRS, Reseau Stockage Electrochim Energie RS2E, Toulouse, France

[5] Drexel Univ, Dept Mat Sci Engn, Philadelphia, PA 19104 USA

[6] Drexel Univ, AJ Drexel Nanotechnol Inst, Philadelphia, PA 19104 USA

[7] Rowan Univ, Dept Phys & Astron, Glassboro, NJ 08028 USA

来源：

JOURNAL OF POWER SOURCES | 2013年 / 225卷

关键词：

Carbide derived carbon; Micro-supercapacitors; MEMS; Electrochemical capacitor; IMPEDANCE SPECTROSCOPY; CAPACITORS;

D O I：

10.1016/j.jpowsour.2012.10.020

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Interdigitated on-chip micro-supercapacitors based on Carbide Derived Carbon (CDC) films were fabricated and tested. A titanium carbide (TiC) film was patterned and treated with chlorine to obtain a TiC derived carbon (TiC-CDC) film, followed by the deposition of two types of current collectors (Ti/Au and Al) using standard micro-fabrication processes. CDC based micro-supercapacitors were electrochemically characterized by cyclic voltammetry and impedance spectroscopy using a I M tetraethylammonium tetrafluoroborate, NEt4BF4, in propylene carbonate (PC) electrolyte. A capacitance of 0.78 mF for the device and 1.5 mF cm(-2) as the specific capacitance for the footprint of the device was measured for a 2 V potential range at 100 mV s(-1). A specific energy of 3.0 mJ cm(-2) and a specific power of 84 mW cm(-2) were calculated for the devices. These devices provide a pathway for fabricating pure carbon-based micro-supercapacitors by micro-fabrication, and can be used for powering micro-electromechanical systems (MEMS) and electronic devices. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：240 / 244

页数：5

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