A radiation degradation model of metal-oxide-semiconductor field effect transistor

被引:2
作者
Sun Peng [1 ]
Du Lei [1 ]
Chen Wen-Hao [1 ]
He Liang [1 ]
Zhang Xiao-Fang [1 ]
机构
[1] Xidian Univ, Sch Tech Phys, Xian 710071, Peoples R China
基金
中国国家自然科学基金;
关键词
interface trap; oxide trap; metal-oxide-semiconductor field effect transistor; radiation; INTERFACE-TRAP FORMATION; 1/F NOISE; HYDROGEN;
D O I
10.7498/aps.61.107803
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Based on the production kinetics of oxide-trapped charge and interface-trapped charge and the microscopic mechanism of radiation damage, a model of post-irradiation threshold voltage drift due to oxide trap and interface trap as a function of radiation dose is proposed. This model predicts that the post-irradiation threshold voltage drift due to oxide trap and interface trap would be linear in dose at low dose levels. At high dose levels, the post-irradiation threshold voltage drift due to oxide trap tend to be saturated, its peak value has no correlation with radiation dose, and the post-irradiation threshold voltage drift due to interface trap has an exponential relationship with radiation dose. In addition, the model indicates that the oxide-trapped charge and the interface-trapped charge start a saturation phenomenon at different radiation doses, and the saturation phenomenon of oxide-trapped charge appears earlier than interface-trapped charge. Finally, the experimental results accord well with the model. This model provides a more accurate prediction for radiation damage in metal-oxide-semiconductor field effect transistor.
引用
收藏
页数:5
相关论文
共 19 条
[1]   Total-ionizing-dose effects in modern CMOS technologies [J].
Barnaby, H. J. .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2006, 53 (06) :3103-3121
[2]   DOSE AND ENERGY-DEPENDENCE OF INTERFACE TRAP FORMATION IN CO-60 AND X-RAY ENVIRONMENTS [J].
BENEDETTO, JM ;
BOESCH, HE ;
MCLEAN, FB .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1988, 35 (06) :1260-1264
[3]   A model considering the ionizing radiation effects in MOS structure [J].
Chen Wei-Hua ;
Du Lei ;
Zhuang Yi-Qi ;
Bao Jun-Lin ;
He Liang ;
Zhang Tian-Fu ;
Zhang Xue .
ACTA PHYSICA SINICA, 2009, 58 (06) :4090-4095
[4]   Mechanisms of enhanced radiation-induced degradation due to excess molecular hydrogen in bipolar oxides [J].
Chen, X. J. ;
Barnaby, H. J. ;
Vermeire, B. ;
Holbert, K. ;
Wright, D. ;
Pease, R. L. ;
Dunham, G. ;
Platteter, D. G. ;
Seiler, J. ;
McClure, S. ;
Adell, P. .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2007, 54 (06) :1913-1919
[5]   1/F NOISE AND RADIATION EFFECTS IN MOS DEVICES [J].
FLEETWOOD, DM ;
MEISENHEIMER, TL ;
SCHOFIELD, JH .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1994, 41 (11) :1953-1964
[6]   EFFECTS OF OXIDE TRAPS, INTERFACE TRAPS, AND BORDER TRAPS ON METAL-OXIDE-SEMICONDUCTOR DEVICES [J].
FLEETWOOD, DM ;
WINOKUR, PS ;
REBER, RA ;
MEISENHEIMER, TL ;
SCHWANK, JR ;
SHANEYFELT, MR ;
RIEWE, LC .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (10) :5058-5074
[7]  
Harold PH, 2003, IEEE T NUCL SCI, V50, P1901, DOI DOI 10.1109/TNS.2003.821803
[8]   SATURATION OF RADIATION-INDUCED THRESHOLD-VOLTAGE SHIFTS IN THIN-OXIDE MOSFETS AT 80-K [J].
KLEIN, RB ;
SAKS, NS ;
SHANFIELD, Z .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1990, 37 (06) :1690-1695
[9]  
Lai ZW, 1998, ANTIRADIATION ELECT, P74
[10]   A comprehensive physically based predictive model for radiation damage in MOS systems [J].
Lenahan, PM ;
Conley, JF .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1998, 45 (06) :2413-2423