A radiation degradation model of metal-oxide-semiconductor field effect transistor

被引:2
|
作者
Sun Peng [1 ]
Du Lei [1 ]
Chen Wen-Hao [1 ]
He Liang [1 ]
Zhang Xiao-Fang [1 ]
机构
[1] Xidian Univ, Sch Tech Phys, Xian 710071, Peoples R China
基金
中国国家自然科学基金;
关键词
interface trap; oxide trap; metal-oxide-semiconductor field effect transistor; radiation; INTERFACE-TRAP FORMATION; 1/F NOISE; HYDROGEN;
D O I
10.7498/aps.61.107803
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Based on the production kinetics of oxide-trapped charge and interface-trapped charge and the microscopic mechanism of radiation damage, a model of post-irradiation threshold voltage drift due to oxide trap and interface trap as a function of radiation dose is proposed. This model predicts that the post-irradiation threshold voltage drift due to oxide trap and interface trap would be linear in dose at low dose levels. At high dose levels, the post-irradiation threshold voltage drift due to oxide trap tend to be saturated, its peak value has no correlation with radiation dose, and the post-irradiation threshold voltage drift due to interface trap has an exponential relationship with radiation dose. In addition, the model indicates that the oxide-trapped charge and the interface-trapped charge start a saturation phenomenon at different radiation doses, and the saturation phenomenon of oxide-trapped charge appears earlier than interface-trapped charge. Finally, the experimental results accord well with the model. This model provides a more accurate prediction for radiation damage in metal-oxide-semiconductor field effect transistor.
引用
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页数:5
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