Gravimetric Chemical Sensor based on the Direct Integration of SWNTs on AlN Contour-Mode MEMS Resonators

被引：15

作者：

Rinaldi, Matteo ^{[1
]}

Zuniga, Chiara ^{[1
]}

Sinha, Nipun ^{[2
]}

Taheri, Marzie ^{[1
]}

Piazza, Gianluca ^{[1
]}

Khamis, Samuel M. ^{[3
]}

Johnson, A. T. ^{[3
]}

机构：

[1] Univ Penn, Dept Elect & Syst Engn, Philadelphia, PA 19104 USA

[2] Univ Penn, Dept Mech Engn & Appl Mech, Philadelphia, PA 19104 USA

[3] Univ Penn, Dept Phys & Astron, Philadelphia, PA 19104 USA

来源：

2008 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, VOLS 1 AND 2 | 2008年

关键词：

D O I：

10.1109/FREQ.2008.4623036

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper reports on the first demonstration of a gravimetric chemical sensor based on direct integration of Single Wall Carbon Nanotubes (SWNTs) grown by Chemical Vapor Deposition (CVD) on AlN Contour-Mode MicroElectroMechanical (MEMS) resonators. In this first prototype the ability of SWNTs to readily adsorb volatile organic chemicals has been combined with the capability of AlN Contour-Mode MEMS resonator to provide for different levels of sensitivity due to separate frequencies of operation on the same die. Two devices with resonance frequencies of 287 MHz and 442 MHz have been exposed to different concentrations of DMMP in the range from 80 to 800 ppm. Values of mass sensitivity equal to 1.8 KHz/pg and 2.65 KHz/pg respectively have been measured.

引用

页码：443 / +

页数：2

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