Surface Acoustic Wave Ultraviolet Sensor Using Epitaxial AlGaN/(Al,Ga)N Film

被引：2

作者：

Koh, K. ^{[1
]}

Nakai, K. ^{[1
]}

Negisi, T. ^{[1
]}

Yokota, M. ^{[1
]}

Hohkawa, K. ^{[1
]}

机构：

[1] Kanagawa Inst Technol, Fac Engn, Atsugi, Kanagawa 2430292, Japan

来源：

2006 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-5, PROCEEDINGS | 2006年

关键词：

SAW UV sensor; AlN film; AlGaN film; UV sensor;

D O I：

10.1109/ULTSYM.2006.446

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

In order to realize SAW ultraviolet sensor with short variable wavelength selectivity and high sensitivity, we study a SAW ultraviolet sensor using the AlGaN/(Al, Ga)N/Al2O3 system. When irradiating UV light on the surface of propagating path, the shift of frequency and change of insertion loss can be measured. Experimental results indicate that this sensor have good wavelength selectivity and could detected the weaker UV light power with several microwatt.

引用

页码：1774 / 1777

页数：4

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