Study on Young's modulus of thin films on Kapton by microtensile testing combined with dual DIC system

被引：33

作者：

He, Wei ^{[1
,3
]}

Goudeau, Philippe ^{[1
]}

Le Bourhis, Eric ^{[1
]}

Renault, Pierre-Olivier ^{[1
]}

Dupre, Jean Christophe ^{[2
]}

Doumalin, Pascal ^{[2
]}

Wang, Shibin ^{[3
]}

机构：

[1] Univ Poitiers, CNRS, Inst Pprime, Dept Phys & Mecan Mat, Bd Marie & Pierre Curie, F-86962 Futuroscope, France

[2] Univ Poitiers, CNRS, Inst Pprime, Axis Photomech & Expt Mech PEM, Bd Marie & Pierre Curie, F-86962 Futuroscope, France

[3] Tianjin Univ, Dept Mech, Tianjin 300350, Peoples R China

来源：

SURFACE & COATINGS TECHNOLOGY | 2016年 / 308卷

基金：

中国国家自然科学基金;

关键词：

Nanostructured thin films; Microtensile testing; Dual DIC system; Elastic modulus; DIGITAL IMAGE CORRELATION; X-RAY-DIFFRACTION; ELASTIC PROPERTIES; STRESS TRANSFER; BULGE TEST; STRAIN; DEFORMATION; INTERFACE; RATIO; CU;

D O I：

10.1016/j.surfcoat.2016.07.114

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this paper, a method is proposed to determine the in-plane elastic modulus of thin films. Thanks to our custom-designed dual digital image correlation (DIC) system, it is possible to measure the time-resolved strain of film and substrate simultaneously during the microtensile testing. The macroscopic strain difference between coated and uncoated section allows extracting the elastic constants of thin films with high precision. In the case of 400 nm tungsten films coated on each side of one substrate over half of the gauge length, the value obtained agrees well with the bulk one. Furthermore, finite element method (FEM) has been performed to simulate the mechanical behavior of the specimen. High consistency with theoretical and experimental results is verified. (C) 2016 Elsevier B.V. All rights reserved.

引用

页码：273 / 279

页数：7

共 49 条

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