Structure and optical anisotropy of pulsed-laser deposited TiO2 films for optical applications

被引：5

作者：

Stankova, Nadya E. ^{[1
]}

Dimitrov, Ivan G. ^{[1
]}

Stoyanchov, Toshko R. ^{[1
]}

Atanasov, Petar A. ^{[1
]}

Kovacheva, D. ^{[2
]}

机构：

[1] Bulgarian Acad Sci, Inst Elect, BU-1784 Sofia, Bulgaria

[2] Bulgarian Acad Sci, Inst Gen & Inorgan Chem, BU-1113 Sofia, Bulgaria

来源：

APPLIED SURFACE SCIENCE | 2009年 / 255卷 / 10期

关键词：

Single-mode TiO2 waveguiding films; Pulsed-laser deposition; Birefringence; Optical gas sensors; THIN-FILMS; SENSOR;

D O I：

10.1016/j.apsusc.2008.07.203

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The evolution of the crystal, the microstructural and the optical properties of pulsed-laser deposited TiO2 films, investigated by X-ray diffraction, atomic force microscopy, scanning electron microscopy, optical transmittance and m-line spectroscopy measurements are reported. The samples were grown on (0 0 1) SiO2 substrates at temperatures from 250 to 600 degrees C and oxygen pressures from 1 to 15 Pa. Crystalline films consisting of single anatase or anatase and rutile phases, were obtained at temperatures higher than 400 degrees C. A tendency toward columnar-like growth morphology was observed in the samples. Strong dependence of the optical properties on the surface roughness and the microstructure was determined. All films revealed single-mode waveguiding and optically anisotropic properties. (C) 2008 Elsevier B. V. All rights reserved.

引用

页码：5275 / 5279

页数：5

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