High-accuracy range-sensing system based on FMCW using low-cost VCSEL

被引：106

作者：

Hariyama, Tatsuo ^{[1
]}

Sandborn, Phillip A. M. ^{[2
]}

Watanabe, Masahiro ^{[1
]}

Wu, Ming C. ^{[2
]}

机构：

[1] Hitachi, Res & Dev Grp, Inspect & Measurement Res Dept, Totsuka Ku, 292 Yoshida Cho, Yokohama, Kanagawa 2440817, Japan

[2] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

来源：

OPTICS EXPRESS | 2018年 / 26卷 / 07期

关键词：

OPTICAL COHERENCE TOMOGRAPHY; CONTINUOUS-WAVE LADAR; SWEPT-SOURCE; DISTANCE; PRECISION; OCT;

D O I：

10.1364/OE.26.009285

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Long-range shape measurement with high accuracy is needed for precision manufacturing of large-scale parts such as turbines, compressors, and trains. We have developed a high-accuracy ranging system based on frequency-modulated continuous-wave (FMCW) technology. Our system has two unique features. First, it achieves high-accuracy range measurement by directly modulating a low-cost vertical-cavity surface-emitting laser (VCSEL) at high sweep rates. The nonlinearity of the optical frequency sweep is compensated for by resampling through a reference interferometer. Second, an optical fiber with multiple fiber Bragg grating (FBG) structures is used for distance calibration. Ranging accuracy better than 10 mu m is achieved at 2 m distance. Three-dimensional (3D) imaging of 10-cubic-meter volume has been obtained by combining the FMCW ranging with a galvanometer scanner. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

引用

页码：9285 / 9297

页数：13

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