High-accuracy range-sensing system based on FMCW using low-cost VCSEL

被引:98
作者
Hariyama, Tatsuo [1 ]
Sandborn, Phillip A. M. [2 ]
Watanabe, Masahiro [1 ]
Wu, Ming C. [2 ]
机构
[1] Hitachi, Res & Dev Grp, Inspect & Measurement Res Dept, Totsuka Ku, 292 Yoshida Cho, Yokohama, Kanagawa 2440817, Japan
[2] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
来源
OPTICS EXPRESS | 2018年 / 26卷 / 07期
关键词
OPTICAL COHERENCE TOMOGRAPHY; CONTINUOUS-WAVE LADAR; SWEPT-SOURCE; DISTANCE; PRECISION; OCT;
D O I
10.1364/OE.26.009285
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Long-range shape measurement with high accuracy is needed for precision manufacturing of large-scale parts such as turbines, compressors, and trains. We have developed a high-accuracy ranging system based on frequency-modulated continuous-wave (FMCW) technology. Our system has two unique features. First, it achieves high-accuracy range measurement by directly modulating a low-cost vertical-cavity surface-emitting laser (VCSEL) at high sweep rates. The nonlinearity of the optical frequency sweep is compensated for by resampling through a reference interferometer. Second, an optical fiber with multiple fiber Bragg grating (FBG) structures is used for distance calibration. Ranging accuracy better than 10 mu m is achieved at 2 m distance. Three-dimensional (3D) imaging of 10-cubic-meter volume has been obtained by combining the FMCW ranging with a galvanometer scanner. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:9285 / 9297
页数:13
相关论文
共 22 条
  • [1] Suppression of nonlinear frequency sweep in an optical frequency-domain reflectometer by use of Hilbert transformation
    Ahn, TJ
    Lee, JY
    Kim, DY
    [J]. APPLIED OPTICS, 2005, 44 (35) : 7630 - 7634
  • [2] Laser ranging:: a critical review of usual techniques for distance measurement
    Amann, MC
    Bosch, T
    Lescure, M
    Myllylä, R
    Rioux, M
    [J]. OPTICAL ENGINEERING, 2001, 40 (01) : 10 - 19
  • [3] [Anonymous], 1998, Fiber optic test and measurement
  • [4] Accuracy of active chirp linearization for broadband frequency modulated continuous wave ladar
    Barber, Zeb W.
    Babbitt, Wm. Randall
    Kaylor, Brant
    Reibel, Randy R.
    Roos, Peter A.
    [J]. APPLIED OPTICS, 2010, 49 (02) : 213 - 219
  • [5] Comb-calibrated laser ranging for three-dimensional surface profiling with micrometer-level precision at a distance
    Baumann, E.
    Giorgetta, F. R.
    Deschenes, J. -D.
    Swann, W. C.
    Coddington, I.
    Newbury, N. R.
    [J]. OPTICS EXPRESS, 2014, 22 (21): : 24914 - 24928
  • [6] Comb-calibrated frequency-modulated continuous-wave ladar for absolute distance measurements
    Baumann, Esther
    Giorgetta, Fabrizio R.
    Coddington, Ian
    Sinclair, Laura C.
    Knabe, Kevin
    Swann, William C.
    Newbury, Nathan R.
    [J]. OPTICS LETTERS, 2013, 38 (12) : 2026 - 2028
  • [7] Electronic-Photonic Integrated Circuit for 3D Microimaging
    Behroozpour, Behnam
    Sandborn, Phillip A. M.
    Quack, Niels
    Seok, Tae-Joon
    Matsui, Yasuhiro
    Wu, Ming C.
    Boser, Bernhard E.
    [J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2017, 52 (01) : 161 - 172
  • [8] Optical methods for distance and displacement measurements
    Berkovic, Garry
    Shafir, Ehud
    [J]. ADVANCES IN OPTICS AND PHOTONICS, 2012, 4 (04): : 441 - 471
  • [9] High-precision, high-accuracy ultralong-range swept-source optical coherence tomography using vertical cavity surface emitting laser light source
    Grulkowski, Ireneusz
    Liu, Jonathan J.
    Potsaid, Benjamin
    Jayaraman, Vijaysekhar
    Jiang, James
    Fujimoto, James G.
    Cable, Alex E.
    [J]. OPTICS LETTERS, 2013, 38 (05) : 673 - 675
  • [10] Fourier Domain Mode Locking (FDML): A new laser operating regime and applications for optical coherence tomography
    Huber, R
    Wojtkowski, M
    Fujimoto, JG
    [J]. OPTICS EXPRESS, 2006, 14 (08) : 3225 - 3237