Effect of binning on the inversion of ARXPS data

被引：3

作者：

Paynter, R. W. ^{[1
]}

机构：

[1] INRS Energie Mat Telecommun, Varennes, PQ, Canada

来源：

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA | 2013年 / 187卷

基金：

加拿大自然科学与工程研究理事会;

关键词：

Angle-resolved X-ray photoelectron spectroscopy; Concentration gradient; Maximum entropy method; Tikhonov regularization; ANGLE-RESOLVED XPS; RAY PHOTOELECTRON-SPECTROSCOPY; DEPTH PROFILES; DEPENDENT XPS; AES;

D O I：

10.1016/j.elspec.2013.03.010

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

From a known starting depth profile, synthetic ARXPS data were produced in 96 channels distributed between photoemission angles of 23 degrees and 83 degrees, and Poisson noise was added to give 100 data sets which were then binned in various ways before inversion to extract a depth profile using regularization and the L-curve criterion for the regularization parameter. When the data were inverted using the mean angles in the bins, it was observed that the best profiles were obtained by using bins that were 4 or 6 channels wide. It was found however that better profiles were obtained by employing 96 channels and binning during the inversion of the ARXPS data so as to take into account the effective analyzer acceptance angle resulting from the binning of the synthetic data. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：53 / 60

页数：8