Development of a non-contact precision measurement technique using optical frequency combs

被引：1

作者：

Onoe, Taro ^{[1
]}

Takahashi, Satoru ^{[1
]}

Takamasu, Kiyoshi ^{[1
]}

Matsumoto, Hirokazu ^{[1
]}

机构：

[1] Univ Tokyo, Dept Precis Engn, Tokyo 1138654, Japan

来源：

EMERGING TECHNOLOGY IN PRECISION ENGINEERING XIV | 2012年 / 523-524卷

关键词：

distance measurement; optical frequency comb; non-contact measurement; DISTANCE;

D O I：

10.4028/www.scientific.net/KEM.523-524.877

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We develop a new method for high-resolution, contactless distance measurement based on self-frequency beats of optical frequency combs. We use two optical frequency comb lasers with Rb-stabilized repetition frequencies for accurate distance measurement. The repetition frequencies of the optical frequency combs differ, allowing down-conversion of gigahertz to several megahertz self-beats without an RF frequency oscillator. A high-resolution, high-sensitivity lock-in amplifier measures the phases of the megahertz frequency signals. The method is applied to distance measurement for objects with rough surfaces separated by several meters.

引用

页码：877 / 882

页数：6

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