Role of Mg doping on morphology and photoluminescence features of MgxZn1-xO films prepared by ultrasonic spray pyrolysis

被引：10

作者：

Zhang, Haiming ^{[1
]}

Zhao, Tingting ^{[1
]}

Hu, Guofeng ^{[1
]}

Miao, Lingling ^{[1
]}

Yang, Yan ^{[1
]}

机构：

[1] Tianjin Polytech Univ, Sch Sci, Tianjin 300160, Peoples R China

来源：

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS | 2012年 / 23卷 / 11期

关键词：

ZNO THIN-FILMS; ROOM-TEMPERATURE; OPTICAL-PROPERTIES; EPITAXIAL-GROWTH;

D O I：

10.1007/s10854-012-0683-z

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The MgxZn1-xO thin films with thickness about several mu m were fabricated for different Mg doping concentrations on p-type Si substrates by using an ultrasonic spray pyrolysis method. The morphologies, crystal structures and optical properties were investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD) and photoluminescence (PL), respectively. The SEM results indicated that the surface of MgxZn1-xO films with low Mg concentrations was flat and compact, and the roughness of films increased with Mg concentration. The XRD patterns demonstrated that the low Mg concentration MgxZn1-xO (x < 0.21) film had a wurtzite structure and the MgO phase was absent. The PL spectra revealed that UV emission has an obvious blue shift with the increase of Mg composition.

引用

页码：1933 / 1937

页数：5

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