Design and fabrication of a novel MEMS thermoelectric generator

被引：3
|
作者：
Dalola, Simone [1 ]
Ferrari, Vittorio [1 ]
机构：
[1] Univ Brescia, Dipartimento Ingn Informaz, I-25123 Brescia, Italy
来源：
EUROSENSORS XXV | 2011年 / 25卷
关键词：
Thermoelectric generators; Micromachining; Seebeck effect; Energy Harvesting; MICROMACHINED THERMOPILE;
D O I：
10.1016/j.proeng.2011.12.051
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A thermoelectric microgenerator based on a novel structure, in which the heat flowing in elements with different thermal resistances produces local temperature differences in the device, has been designed, fabricated in BESOI technology and experimentally characterized. The temperature differences in the microgenerator are converted into a voltage by means of the Seebeck effect exploiting planar thermocouples. (C) 2011 Published by Elsevier Ltd.
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页数：4
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