Design of T-shape vector hydrophone based on MEMS

被引：19

作者：

Guan, Linggang ^{[1
,2
]}

Zhang, Guojun ^{[2
]}

Xu, Jiao ^{[1
]}

Xue, Chenyang ^{[1
,2
]}

Zhang, Wendong ^{[1
,2
]}

Xiong, Jijun ^{[1
,2
]}

机构：

[1] N Univ China, Minist Educ, Key Lab Instrument Sci & Dynam Measurement, Taiyuan 030051, Shanxi, Peoples R China

[2] Sci & Technol Elect Test & Measurement Lab, Taiyuan 030051, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2012年 / 188卷

关键词：

Bionic sensor; Vector hydrophone; MEMS; SOI;

D O I：

10.1016/j.sna.2012.01.018

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports the design and fabrication of T-shape vector hydrophone based on MEMS inspired by fish lateral line. Based on the analysis of mechanical properties of T-beam, the design and fabrication process of microstructures with two different frequencies are described in detail, and the characteristics of the microstructures are analyzed by ANSYS. The first-order resonance frequencies of the two microstructures are 1970 Hz and 10 kHz, and the piezoresistors are placed away from edges about 120 mu m. The T-beam microstructure is fabricated on silicon-on-insulator (SOI) wafers for uniform beam thickness. The test results showed that hydrophones have receiving sensitivity up to -180 dB and -192 dB at 1 kHz (0dB = 1 V/mu Pa), and displayed a clear directivity pattern in the form of "8" shape. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：35 / 40

页数：6

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