The Effects of Proton-Defect Interactions on Radiation-Induced Interface-Trap Formation and Annealing

被引:44
作者
Hughart, D. R. [1 ]
Schrimpf, R. D. [1 ]
Fleetwood, D. M. [1 ]
Rowsey, N. L. [2 ]
Law, M. E. [2 ]
Tuttle, B. R. [3 ]
Pantelides, S. T. [3 ]
机构
[1] Vanderbilt Univ, Dept Elect Engn & Comp Sci, Nashville, TN 37235 USA
[2] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA
[3] Vanderbilt Univ, Dept Phys & Astron, Nashville, TN 37235 USA
关键词
Annealing; elevated temperature irradiation; hydrogen; interface traps; low dose rate; radiation effects; BIPOLAR JUNCTION TRANSISTORS; DOSE-RATE SENSITIVITY; HARDNESS-ASSURANCE; GAIN DEGRADATION; LINEAR CIRCUITS; RATE RESPONSE; MECHANISMS; OXIDES; HYDROGEN; DEVICES;
D O I
10.1109/TNS.2012.2220982
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Interface-trap buildup and annealing are examined as a function of temperature, dose rate, and H-2 concentration using a physics-based model. The roles of a number of common oxide defects in radiation-induced interface-trap buildup are evaluated under various conditions. Defects near the interface play a significant role in determining interface-trap buildup by trapping protons as proton concentration and temperature increase.
引用
收藏
页码:3087 / 3092
页数:6
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