Nanosecond laser-induced surface damage and its mechanism of CaF2 optical window at 248 nm KrF excimer laser

被引：18
作者：
Li, Xin [1 ,2 ]
Dou, Xian-an [1 ,2 ]
Zhu, Hong [3 ]
Hu, Yue [4 ]
Wang, Xi [1 ,2 ]
机构：
[1] Natl Univ Def Technol, State Key Lab Pulsed Power Laser Technol, Hefei 230037, Peoples R China
[2] Anhui Lab Adv Laser Technol, Hefei 230037, Peoples R China
[3] Army Artillery & Air Def Acad, Key Lab Polarizat Imaging Detect Technol Anhui Pr, Hefei 230037, Peoples R China
[4] Hefei Second Sanat Retired Cadres Anhui Prov Mil, Hefei 230061, Peoples R China
来源：
SCIENTIFIC REPORTS | 2020年 / 10卷 / 01期
关键词：
FUSED-SILICA; CRYSTALS; DEFECTS; PULSES; BULK;
D O I：
10.1038/s41598-020-62469-y
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
Calcium fluoride (CaF2) crystals is a kind of important optical material for ultraviolet (UV) and deep-ultraviolet (DUV) lithography and high-power laser-related applications. However, its laser-induced damage threshold (LIDT) directly affects the laser power, so that the above-mentioned applications could be limited. Therefore, the research on the damage characteristics and laser damage resistance of CaF2 crystals is urgent. A 3D Finite-Difference Time-Domain (FDTD) method with Maxwell spinor equation is used, and the results show that the electric field intensity of rear surface is larger than that of front surface, which causes a lower threshold and is consistent with the experimental observations. And a thermo-mechanical coupled finite element model (FEM) of CaF2 with Ce2O3 impurities, which are introduced by polishing process, has semiquantitatively described the damage mechanism of CaF2 by 248 nm-excimer laser.
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页数：14
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