Ensured interpretation of FTIR reflectance spectra of SiCCVD coatings by optical modelling

被引：0
作者：
Grählert, W [1 ]
Hopfe, V [1 ]
机构：
[1] Fraunhofer Inst Werkstoff & Strahltechnik, D-01277 Dresden, Germany
来源：
ZEITSCHRIFT FUR METALLKUNDE | 2001年 / 92卷 / 10期
关键词：
FTIR reflectance spectroscopy; silicon carbide; optical modelling; surface roughness; effective media approximation;
D O I：
暂无
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
Infrared reflection spectroscopy as non-destructive characterization method has been applied for the interpretation of SiC coatings deposited by chemical vapour deposition (CVD). Additional spectral features caused by sample topology make worse a conventional interpretation of the reflectance spectra. Simulation calculations using an adequate optical model allow the separation of the absorption properties of coating and the topology of the sample. Thereby, the surface roughness of SiC coatings have been considered in the optical model using an effective media approximation.
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页码：1175 / 1179
页数：5
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