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- [22] FABRICATION OF SINGLE-CRYSTAL SILICON CARBIDE MEMS/NEMS FOR BIO-SENSING AND HARSH ENVIRONMENTS 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, : 261 - 263
- [24] HYDROTHERMAL OXIDATION OF SILICON CARBIDE AND ITS BEARING ON WET WEAR MECHANISMS CORROSION, WEAR, FATIGUE, AND RELIABILITY OF CERAMICS, 2009, 29 (03): : 143 - +