Calibration of an axial symmetric transmission gauge in ultrahigh and extreme high vacuum

被引:7
作者
Akimichi, H [1 ]
Arai, T [1 ]
Takeuchi, K [1 ]
Tuzi, Y [1 ]
Arakawa, I [1 ]
机构
[1] GAKUSHUIN UNIV,DEPT PHYS,TOSHIMA KU,TOKYO 171,JAPAN
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1997年 / 15卷 / 03期
关键词
D O I
10.1116/1.580815
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The sensitivity factor of an axial symmetric transmission gauge (AT gauge) was determined by the conductance modulation method (CMM) in the pressure range from 10(-10) to 10(-6) Pa. The gauge has a Bessel-box type energy filter between a Bayard-Alpert gauge type ionizer and an ion detector to eliminate the limiting factors of pressure measurement in extreme high vacuum such as the soft x-ray effect and the electron stimulated desorption of ions. The lower limit of the pressure measurement of the gauge is estimated to be about 10(-12) Pa or lower. The sensitivity factor showed a slight pressure dependence caused mainly by outgassing from the gauge itself. The sensitivity factor of the AT gauge, which was further corrected for the effect of outgassing by the CMM, is almost constant in the pressure range from 10(-10) to 10(-6) Pa and is (2.3 +/- 0.1) x 10(3) Pa-1 for hydrogen. (C) 1997 American Vacuum Society.
引用
收藏
页码:753 / 758
页数:6
相关论文
共 24 条
[1]   Improvement of the performance of the ionization gauge with energy filter for the measurement of an extremely high vacuum [J].
Akimichi, H ;
Takahashi, H ;
Tanaka, T ;
Takeuchi, K ;
Tuzi, Y .
VACUUM, 1996, 47 (6-8) :561-565
[2]  
AKIMICHI H, 1995, VACUUM, V46, P749, DOI 10.1016/0042-207X(95)00030-5
[3]   NEW ELECTRON SPECTROMETER DESIGN .2. [J].
ALLEN, JD ;
DURHAM, JD ;
SCHWEITZER, GK ;
DEEDS, WE .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1976, 8 (05) :395-410
[4]  
ARAI T, 1995, J VAC SOC JPN, V38, P262
[5]   EXTENSION OF THE LOW PRESSURE RANGE OF THE IONIZATION GAUGE [J].
BAYARD, RT ;
ALPERT, D .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1950, 21 (06) :571-572
[6]  
BENVENUTI C, 1980, 8TH P INT VAC C, V2, P199
[7]   NEW DEFLECTED-BEAM GAUGE FOR PRESSURES BELOW 10-12 TORR [J].
BLECHSCHMIDT, D .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (05) :1072-1078
[8]  
CALCATELLI C, 1974, JPN J APPL PHYS S, V2, P127
[9]   CONSTRUCTION AND PERFORMANCE-CHARACTERISTICS OF A LOW-COST ENERGY PREFILTER [J].
CRAIG, JH ;
HOCK, JL .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (06) :1360-1363
[10]  
CRAIG JH, 1989, J VAC SCI TECHNOL A, V17, P3337