A resonant micro accelerometer based on electrostatic stiffness variation

被引：36
|
作者：
Comi, Claudia [1 ]
Corigliano, Alberto [1 ]
Ghisi, Aldo [1 ]
Zerbini, Sarah [2 ]
机构：
[1] Politecn Milan, Dept Civil & Environm Engn, I-20133 Milan, Italy
[2] STMicroelectronics, AMS Grp, I-20010 Cornaredo, Italy
来源：
MECCANICA | 2013年 / 48卷 / 08期
关键词：
MEMS; Resonant accelerometer; Electrostatic stiffness; Out-of plane sensing; Pull-in instability;
D O I：
10.1007/s11012-013-9768-x
中图分类号：
O3 [力学];
学科分类号：
08 ; 0801 ;
摘要：
A new out-of-plane resonant micro-machined accelerometer has been designed, modelled and fabricated. The sensing principle is based on the variation of the electrostatic stiffness of two torsional resonators mechanically coupled with an inertial proof mass. The accelerometer, fabricated by the ThELMA (R) surface micro-machining process of STMicroelectronics, constitutes a further step of a research focussing on the design of in-plane and out-of-plane resonant micro accelerometers. Preliminary electrostatic measures of the torsional resonators response have been compared with the theoretical predictions.
引用
收藏
页码：1893 / 1900
页数：8
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