Enhanced thermoelectric properties of electrodeposited Bi2Te3 thin films using TiN diffusion barrier layer on a stainless-steel substrate and thermal annealing

被引:10
作者
Eguchi, Rikuo [1 ]
Yamamuro, Hiroki [1 ]
Takashiri, Masayuki [1 ]
机构
[1] Tokai Univ, Dept Mat Sci, 4-1-1 Kitakaname, Hiratsuka, Kanagawa 2591292, Japan
基金
日本学术振兴会;
关键词
Electrodeposition; Bismuth telluride; Thin film; Thermoelectric; Thermal annealing; Diffusion barrier layer; Titanium nitride; Diffusion barrier; CRYSTAL-GROWTH; ELECTRON-BEAM; TEMPERATURE; CONDUCTIVITY; IRRADIATION;
D O I
10.1016/j.tsf.2020.138356
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Electrodeposition is an efficient wet-chemical approach to reduce the manufacturing cost of thin films. However, the thin films fabricated using this approach show properties inferior to those of the thin films fabricated using dry processes. In this study, a titanium nitride (TiN) diffusion barrier layer was formed on a stainless-steel (SS) substrate to improve the thermoelectric properties of electrodeposited Bi2Te3 thin films. The electrodeposition of the Bi2Te3 films was carried out in the potentiostatic mode using a standard three-electrode cell, followed by thermal annealing at 300-500 degrees C. The X-ray diffraction and electron probe X-ray microanalysis results revealed that impurity diffusion from the SS substrate did not occur in the annealed films deposited on the TiN-coated SS substrate. However, the Bi2Te3-to-Bi4Te5 crystalline phase transformation occurred at higher annealing tem-peratures because of the preferential evaporation of Te atoms from the film surface, leading to the deterioration of the thermoelectric properties of the films. As a result, the 300 degrees C-annealed film formed on the TiN-coated SS substrate showed the highest power factor of 4.4 mu W/(cm.K-2), which is approximately four times higher than that of the corresponding film formed on the bare SS substrate. Therefore, the TiN coating and optimum annealing temperature improved the thermoelectric properties of the electrodeposited Bi2Te3 thin films.
引用
收藏
页数:7
相关论文
共 51 条
[1]  
[Anonymous], 2010, IEEE Solid-State Circuits Mag, DOI DOI 10.1109/MSSC.2010.936667
[2]   Energy harvesting for assistive and mobile applications [J].
Bhatnagar, Vikrant ;
Owende, Philip .
ENERGY SCIENCE & ENGINEERING, 2015, 3 (03) :153-173
[3]   Thermoelectric Material Electroplating: a Historical Review [J].
Boulanger, Clotilde .
JOURNAL OF ELECTRONIC MATERIALS, 2010, 39 (09) :1818-1827
[4]   Comprehensive study on effect of electron beam irradiation on electrical, thermo-electric and magnetic properties of oxygen rich LaMnO3.15 compound [J].
Christopher, Benedict ;
Rao, Ashok ;
Okram, G. S. ;
Petwal, Vikash Chandra ;
Verma, Vijay Pal ;
Dwivedi, Jishnu .
JOURNAL OF ALLOYS AND COMPOUNDS, 2017, 703 :216-224
[5]   Thermoelectric properties of Al-doped ZnO composite films with polymer nanoparticles prepared by pulsed laser deposition [J].
Darwish, Abdalla M. ;
Muhammad, Aziz ;
Sarkisov, Sergey S. ;
Mele, Paolo ;
Saini, Shrikant ;
Liu, Jing ;
Shiomi, Junichiro .
COMPOSITES PART B-ENGINEERING, 2019, 167 :406-410
[6]   High-performance bismuth telluride thermoelectric thin films fabricated by using the two-step single-source thermal evaporation [J].
Fan, Ping ;
Zhang, Peng-cheng ;
Liang, Guang-xing ;
Li, Fu ;
Chen, Yue-xing ;
Luo, Jing-ting ;
Zhang, Xiang-hua ;
Chen, Shuo ;
Zheng, Zhuang-hao .
JOURNAL OF ALLOYS AND COMPOUNDS, 2020, 819
[7]   Influence of annealing on the structural and electrical transport properties of Bi0.5Sb1.5Te3.0 thin films deposited by co-sputtering [J].
Fang, Bo ;
Zeng, Zhigang ;
Yan, Xiaoxia ;
Hu, Zhiyu .
JOURNAL OF MATERIALS SCIENCE, 2013, 48 (12) :4408-4415
[8]   Flexible thermoelectric generator for ambient assisted living wearable biometric sensors [J].
Francioso, L. ;
De Pascali, C. ;
Farella, I. ;
Martucci, C. ;
Creti, P. ;
Siciliano, P. ;
Perrone, A. .
JOURNAL OF POWER SOURCES, 2011, 196 (06) :3239-3243
[9]   THE USE OF SEMICONDUCTORS IN THERMOELECTRIC REFRIGERATION [J].
GOLDSMID, HJ ;
DOUGLAS, RW .
BRITISH JOURNAL OF APPLIED PHYSICS, 1954, 5 (NOV) :386-390
[10]   Optimization of thermoelectric properties on Bi2Te3 thin films deposited by thermal co-evaporation [J].
Goncalves, L. M. ;
Couto, C. ;
Alpuim, P. ;
Rolo, A. G. ;
Voelklein, F. ;
Correia, J. H. .
THIN SOLID FILMS, 2010, 518 (10) :2816-2821