Kinetics of an RF low-pressure discharge with a condensed phase

被引：1
|
作者：
Strunin, VI [1 ]
Lyakhov, AA [1 ]
Khudaibergenov, GZ [1 ]
Shkurkin, VV [1 ]
机构：
[1] Omsk State Univ, Omsk 644077, Russia
来源：
TECHNICAL PHYSICS | 2004年 / 49卷 / 04期
关键词：
Dust; Distribution Function; Electron Energy; Energy Distribution; Dust Particle;
D O I：
10.1134/1.1736923
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The electron energy distribution function in an RF low-pressure plasma is found in the presence of dust particles. The effect of microscopic objects on the electroneutrality of the plasma and the electron energy distribution is estimated. (C) 2004 MAIK "Nauka / Interperiodica".
引用
收藏
页码：502 / 504
页数：3
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