Raman scattering properties of structural defects in SiC

被引:0
作者
Feng, Xianfeng [1 ]
Zang, Yuan [1 ]
机构
[1] Xian Univ Technol, Dept Elect Engn, Xian 710048, Peoples R China
来源
Proceedings of the 2016 3rd International Conference on Mechatronics and Information Technology (ICMIT) | 2016年 / 49卷
关键词
SiC; defects; Raman spectra; 6H-SIC CRYSTALS; SPECTROSCOPY; GROWTH; POLYTYPES;
D O I
暂无
中图分类号
TP301 [理论、方法];
学科分类号
081202 ;
摘要
Although silicon carbide crystals have been commercially available, the structural discontinuity in crystal always leads to complex interplay between the atomic positions and the electronic structures, hence results in the crystal reconstructing structurally and electronically. Here we investigate the vibrational properties of 6H-SiC (6H-polytype silicon carbide) crystals containing structural defects, e.g. micropipes (MPs), screw-dislocations (SDs) and threading dislocations (TDs), by Raman scattering. For the first-order Raman scattering, the intensity of the transverse optical phonon band centered at similar to 796 cm(-1), which corresponds to the phonon mode at the Gamma point in 3C-SiC (3C-polytype silicon carbide), is sensitive to these structural defects. But the second-order Raman features of the structural defects have no distinguished difference. In addition, the carrier concentration within an MP might be higher than that in a SD or a TD, revealing that the carrier traps surrounding the MP are lower than that for the SD or TD. These results offer a simple way for investigating the electrical properties of structural defects in SiC crystals.
引用
收藏
页码:829 / 835
页数:7
相关论文
共 24 条
  • [1] Spatial characterization of doped SiC wafers by Raman spectroscopy
    Burton, JC
    Sun, L
    Pophristic, M
    Lukacs, SJ
    Long, FH
    Feng, ZC
    Ferguson, IT
    [J]. JOURNAL OF APPLIED PHYSICS, 1998, 84 (11) : 6268 - 6273
  • [2] Surface-enhanced Raman scattering
    Campion, A
    Kambhampati, P
    [J]. CHEMICAL SOCIETY REVIEWS, 1998, 27 (04) : 241 - 250
  • [3] Status of silicon carbide (SiC) as a wide-bandgap semiconductor for high-temperature applications: A review
    Casady, JB
    Johnson, RW
    [J]. SOLID-STATE ELECTRONICS, 1996, 39 (10) : 1409 - 1422
  • [4] PHONON DISPERSION CURVES BY RAMAN SCATTERING IN SIC POLYTYPES 3C,4H,6H,15R,AND 21R
    FELDMAN, DW
    PARKER, JH
    CHOYKE, WJ
    PATRICK, L
    [J]. PHYSICAL REVIEW, 1968, 173 (03): : 787 - &
  • [5] Raman imaging characterization of electric properties of SiC near a micropipe
    Harima, H
    Hosoda, T
    Nakashima, S
    [J]. SILICON CARBIDE AND RELATED MATERIALS - 1999 PTS, 1 & 2, 2000, 338-3 : 603 - 606
  • [6] Harris L., 1995, EMIS DATAREVIEWS SER
  • [7] Surface-enhanced Raman sensors: early history and the development of sensors for quantitative biowarfare agent and glucose detection
    Haynes, CL
    Yonzon, CR
    Zhang, XY
    Van Duyne, RP
    [J]. JOURNAL OF RAMAN SPECTROSCOPY, 2005, 36 (6-7) : 471 - 484
  • [8] Growth of 6H-SIC crystals along the [011-5] direction
    Herro, ZG
    Epelbaum, BM
    Bickermann, M
    Seitz, C
    Magerl, A
    Winnacker, A
    [J]. JOURNAL OF CRYSTAL GROWTH, 2005, 275 (3-4) : 496 - 503
  • [9] CONTROLLED SUBLIMATION GROWTH OF SINGLE CRYSTALLINE 4H-SIC AND 6H-SIC AND IDENTIFICATION OF POLYTYPES BY X-RAY-DIFFRACTION
    KANAYA, M
    TAKAHASHI, J
    FUJIWARA, Y
    MORITANI, A
    [J]. APPLIED PHYSICS LETTERS, 1991, 58 (01) : 56 - 58
  • [10] Shell-isolated nanoparticle-enhanced Raman spectroscopy
    Li, Jian Feng
    Huang, Yi Fan
    Ding, Yong
    Yang, Zhi Lin
    Li, Song Bo
    Zhou, Xiao Shun
    Fan, Feng Ru
    Zhang, Wei
    Zhou, Zhi You
    Wu, De Yin
    Ren, Bin
    Wang, Zhong Lin
    Tian, Zhong Qun
    [J]. NATURE, 2010, 464 (7287) : 392 - 395