Optical position feedback of quasi-static 2D MOEMS mirrors

被引：3
作者：
Tortschanoff, A. [1 ]
Baumgart, M. [1 ]
Holzmann, D. [1 ]
Lenzhofer, M. [1 ]
Sandner, T. [2 ]
Kenda, A. [1 ]
机构：
[1] Carinthian Tech Res AG, Europastr 4-1, A-9524 Villach, Austria
[2] Fraunhofer Inst Photon Microsyst, Dresden, Germany
来源：
SMART SENSORS, ACTUATORS, AND MEMS VI | 2013年 / 8763卷
关键词：
MOEMS; quasi-static scanner; closed-loop control; MEMS driver; electronics; MEMS;
D O I：
10.1117/12.2016852
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Recently, we have realized a new position sensing device for MOEMS mirrors applicable to arbitrary trajectories, which is based on the measurement of a reflected light beam with a quadrant diode. In this work we present the characteristics of this device, showing first experimental results obtained with a test set-up, but also theoretical considerations and optical ray-tracing simulations.
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页数：7
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