[1] Zhejiang Univ, Dept Mech, Hangzhou 310027, Peoples R China
[2] Zhejiang Univ, Dept Phys, Hangzhou 310027, Peoples R China
[3] Zhejiang Univ, Micro Syst Ctr Res & Dev, Hangzhou 310027, Peoples R China
[4] Zhejiang Univ, Dept State Key Lab Silicon Mat, Hangzhou 310027, Peoples R China
[5] Meijo Univ, Dept Phys, Tenpaku 468, Japan