Deep microstructure topography characterization with optical vortex interferometer

被引：51

作者：

Masajada, Jan ^{[1
]}

Leniec, Monika ^{[1
]}

Jankowska, Elzbieta ^{[1
]}

Thienpont, Hugo ^{[2
]}

Ottevaere, Heidi ^{[2
]}

Gomez, Virginia ^{[2
]}

机构：

[1] Wroclaw Univ Technol, Inst Phys, PL-50370 Wroclaw, Poland

[2] Vrije Univ Brussels, Dept Appl Phys & Photon, B-1050 Brussels, Belgium

来源：

OPTICS EXPRESS | 2008年 / 16卷 / 23期

关键词：

D O I：

10.1364/OE.16.019179

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report on a new method of inspecting deep microstructures manufactured in transparent media. Although their lateral dimension (tens of microns) do not exceed the diffraction limit for optical microscopy resolution, their deepness makes the nondestructive measurements practically impossible with presently available methods. We show that the optical vortex interferometer with a vortex generator can be used to differentiate between the samples of good and poor quality. The measurement system is simple and the interpretation of the results is straightforward. (C) 2008 Optical Society of America

引用

页码：19179 / 19191

页数：13

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