Fabrication of silicon nanopillar arrays by electron beam lithography and reactive ion etching for advanced bacterial adhesion studies

被引：30

作者：

Doll, P. W. ^{[1
]}

Al-Ahmad, A. ^{[2
]}

Bacher, A. ^{[1
]}

Muslija, A. ^{[1
]}

Thelen, R. ^{[1
]}

Hahn, L. ^{[1
]}

Ahrens, R. ^{[1
]}

Spindler, B. ^{[3
]}

Guber, A. E. ^{[1
]}

机构：

[1] Karlsruhe Inst Technol, Inst Microstruct Technol, Hermann von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany

[2] Univ Freiburg, Med Ctr, Dept Operat Dent & Periodontol, Fac Med, Hugstetter Str 55, D-79106 Freiburg, Germany

[3] Fraszentrum Ortenau GmbH & Co KG, Industriestr 2-4, D-77728 Oppenau, Germany

来源：

MATERIALS RESEARCH EXPRESS | 2019年 / 6卷 / 06期

关键词：

nanopillars; electron beam lithography; reactive ion etching; bacterial adhesion; biomaterial associated infections; PILLAR ARRAYS; ASPECT-RATIO; BIOFILMS;

D O I：

10.1088/2053-1591/ab0a16

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Within this work we demonstrate the fabrication of silicon nanopillar arrays for advanced cell/surface interaction studies and the results of the bacterial interaction of Escherichia coli with such highly ordered nanostructures. By combination of Electron Beam Lithography and Reactive Ion Etching a powerful and highly precise method for the fabrication of nanopillars with different diameters in the sub 100 nmregion and high aspect ratios is available. The fabrication method allows building highly ordered nanotopographies which can help to increase the understanding of cell/substrate interaction. The biological results indicate that the adhesion of E. coli correlates to the available discrete adhesion bond points on top of the pillars and additionally that the cells align with the nanostructures to maximize their contact to the surface. The research of such structures will lead to the development of novel materials which might reduce biomaterial associated infections.

引用

页数：11

共 42 条

[21] Highly Ordered Silicon Pillar Arrays As Platforms for Planar Chromatography [J].