Granular superconductor contacts to two-dimensional electron gases

被引：10
作者：
Marsh, AM
Williams, DA
机构：
[1] UNIV CAMBRIDGE,CAVENDISH LAB,MICROELECTR RES CTR,CAMBRIDGE CB3 0HE,ENGLAND
[2] UNIV CAMBRIDGE,CAVENDISH LAB,HITACHI CAMBRIDGE LAB,CAMBRIDGE CB3 0HE,ENGLAND
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1996年 / 14卷 / 04期
关键词：
D O I：
10.1116/1.579984
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Superconducting contacts are made to a buried two-dimensional electron gas using metal multilayers (Sn:Cr:Au) patterned by electron-beam lithography, and sintered using rapid electron-beam annealing. The contact structure has been analyzed using transmission electron microscopy and high-resolution scanning electron microscopy, and many alloys are found to be present, but the structure is predominantly a honeycomb mixture of AuSn4 and CrAs. The resultant contacts are granular superconductors with relatively high critical temperatures of 5-7.5 K. (C) 1996 American Vacuum Society.
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页码：2577 / 2581
页数：5
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