Microstructure, oxidation resistance, mechanical and tribological properties of Mo-Al-N films by reactive magnetron sputtering

被引：69
|
作者：
Xu, Junhua [1 ]
Ju, Hongbo [1 ]
Yu, Lihua [1 ]
机构：
[1] Jiangsu Univ Sci & Technol, Sch Mat Sci & Engn, Key Lab Adv Welding Technol, Zhenjiang 212003, Jiangsu, Peoples R China
来源：
VACUUM | 2014年 / 103卷
基金：
中国国家自然科学基金;
关键词：
Reactive magnetron sputtering; Mo-Al-N films; Oxidation resistance; Tribological properties; COATINGS; BEHAVIOR; WEAR; CRN; FRICTION;
D O I：
10.1016/j.vacuum.2013.11.013
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Mo-Al-N films with various Al content (3.7 at.%-18.3 at.%) were deposited by reactive magnetron sputtering and the effects of Al content on the microstructure, mechanical, oxidation resistance and tribological properties of Mo-Al-N films were investigated. The results showed that the synthesized Mo-Al-N films exhibited the face-centered cubic (fcc) structure with (111)-preferred orientation. The oxidation resistance of Mo-Al-N films increased with increasing Al content. The hardness and elastic modulus of Mo-Al-N films first increased and then decreased with increasing Al content in the films and the highest values were 32.6 GPa and 494 GPa, respectively, at 3.7 at.% Al. The films with an Al content in the range between 4.1 at.% and 9.5 at.% were found to be optimized for wear resistance applications, which showed low average friction coefficient values of 0.31-0.35 and wear rate of 3.6 x 10(-9) -8.1 x 10(-9) mm(3)/Nmm. (C) 2013 Published by Elsevier Ltd.
引用
收藏
页码：21 / 27
页数：7
相关论文
共 50 条
  • [41] Microstructure, mechanical and tribological properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering
    Wang, Yongjun
    Li, Hongxuan
    Ji, Li
    Zhao, Fei
    Kong, Qinghua
    Wang, Yongxia
    Liu, Xiaohong
    Quan, Weilong
    Zhou, Huidi
    Chen, Jianmin
    SURFACE & COATINGS TECHNOLOGY, 2011, 205 (8-9) : 3058 - 3065
  • [42] Structure and Mechanical Properties of Multi-Element (CrMoTaNbVTi)N Films by Reactive Magnetron Sputtering
    Feng Xingguo
    Zheng Yugang
    Zhang Kaifeng
    Zhou Hui
    Hu Hanjun
    RARE METAL MATERIALS AND ENGINEERING, 2020, 49 (08) : 2623 - 2629
  • [43] Microstructures, mechanical and tribological properties of NbN/MoS2 nanomultilayered films deposited by reactive magnetron sputtering
    Zhang, Ergeng
    Liu, Jingling
    Li, Wei
    VACUUM, 2019, 160 : 205 - 209
  • [44] Tribological Properties of CrN/AlN Films Produced by Reactive Magnetron Sputtering
    A. Rojo
    J. Solís
    J. Oseguera
    O. Salas
    R. Reichelt
    Journal of Materials Engineering and Performance, 2010, 19 : 421 - 427
  • [45] Microstructure and mechanical performance of (AlCrNbSiTiV)N films coated by reactive magnetron sputtering
    Wu, C. Y.
    Hsiao, R. C.
    Hsu, C. H.
    Hsieh, T. H.
    Kao, J. Y.
    Hsu, C. Y.
    BULLETIN OF MATERIALS SCIENCE, 2019, 42 (01)
  • [46] MICROSTRUCTURE & CORROSION RESISTANCE FOR WC-Ti-N LAYERS DEPOSITED BY REACTIVE MAGNETRON SPUTTERING
    Mateescu, O. A.
    Balan, A.
    Mateescu, Gh.
    Stamatin, I.
    Samoila, C.
    Ursutiu, D.
    Nascov, V.
    DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES, 2015, 10 (02) : 437 - 443
  • [47] Microstructure and Mechanical Properties of TaN Thin Films Prepared by Reactive Magnetron Sputtering
    Zaman, Anna
    Meletis, Efstathios I.
    COATINGS, 2017, 7 (12):
  • [48] Microstructure, mechanical and tribological properties of TiCN nanocomposite films deposited by DC magnetron sputtering
    Chen, R.
    Tu, J. P.
    Liu, D. G.
    Mai, Y. J.
    Gu, C. D.
    SURFACE & COATINGS TECHNOLOGY, 2011, 205 (21-22) : 5228 - 5234
  • [49] Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering
    Chu, K.
    Shum, P. W.
    Shen, Y. G.
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2006, 131 (1-3): : 62 - 71
  • [50] Microstructure, mechanical and tribological properties of magnetron sputtered VCN films
    Yu, Lihua
    Li, Yong
    Ju, Hongbo
    Xu, Junhua
    SURFACE ENGINEERING, 2017, 33 (12) : 919 - 924
12345