Fracture toughness of diamondlike carbon coatings

被引：44

作者：

Nastasi, M ^{[1
]}

Kodali, P

Walter, KC

Embury, JD

Raj, R

Nakamura, Y

机构：

[1] Los Alamos Natl Lab, Div Mat Sci & Technol, Los Alamos, NM 87545 USA

[2] Univ Colorado, Dept Mech Engn, Boulder, CO 80309 USA

[3] Kagoshima Univ, Dept Engn Mech, Kagoshima 8900065, Japan

来源：

JOURNAL OF MATERIALS RESEARCH | 1999年 / 14卷 / 05期

关键词：

D O I：

10.1557/JMR.1999.0293

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The fracture behavior of diamondlike carbon (DLC) coatings on Si substrates has been examined using microindentation. The presence of DLC coatings reduces the radial crack length to less than one-half the crack length observed in uncoated Si at the same indenter load. A total work of fracture analysis of the radial cracks formed in the DLC-coating/Si-substrate system gives 10.1 MPa m(1/2) as the average fracture toughness for DLC alone. A bond-breaking calculation for DLC suggests that the elastic limit fracture toughness should be 1.5 MPa (m)(1/2). The higher value obtained from experiment and total work analysis suggests that plastic work and/or a tortuous path crack evolution occurred during DLC fracture process.

引用

页码：2173 / 2180

页数：8

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