Influence of UV Rays on the Volt-Capacity Characteristic of SnO2:Co Sensor of Vapors of Hydrogen Peroxide

被引:4
作者
Aleksanyan, M. S. [1 ]
Sayunts, A. G. [1 ]
Zakaryan, A. A. [1 ]
Aroutiounian, V. M. [1 ]
Arakelyan, V. M. [1 ]
Shakhnazaryan, G. E. [1 ]
机构
[1] Yerevan State Univ, Yerevan, Armenia
关键词
sensor; semiconductor; thin film; capacitance-voltage characteristic; hydrogen peroxide vapor; ultraviolet rays; BREATH ANALYSIS; COMPOSITE; AIR; NO2;
D O I
10.3103/S1068337220020048
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
A ceramic target based on cobalt doped SnO(2)metal oxide was synthesized by the solid-phase reaction method. The target was used in the process of high-frequency magnetron sputtering. A thin SnO2:Co film was deposited, which is sensitive to hydrogen peroxide vapor. The current-voltage characteristics of the SnO2:Co sensor were measured in the presence of hydrogen peroxide vapor in the environment while ultraviolet light was exposed to the sensor at room temperature. It was shown that the sensitivity of the SnO2:Co film increases by about 1.6 times when exposed to ultraviolet rays.
引用
收藏
页码:151 / 156
页数:6
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