Laser differential confocal measurement of the outer surface profile of a laser inertial confinement fusion capsule

被引：20

作者：

Wang, Longxiao ^{[1
]}

Zhao, Weiqian ^{[1
]}

Qiu, Lirong ^{[1
]}

Wang, Yun ^{[1
]}

Li, Shaobai ^{[1
]}

Ma, Xianxian ^{[1
]}

机构：

[1] Beijing Inst Technol, Sch Optoelect, Beijing Key Lab Precis Optoelect Measurement Inst, Beijing 100081, Peoples R China

来源：

MEASUREMENT | 2019年 / 135卷

基金：

中国国家自然科学基金;

关键词：

Differential confocal; ICF capsule; Outer surface profile; Inclination; PERFORMANCE;

D O I：

10.1016/j.measurement.2018.11.037

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new laser differential confocal measurement method with a high axial resolution and insensitivity to surface inclination is proposed for high-precision measurement of the outer surface profile of a laser inertial confinement fusion (ICF) capsule. This method uses an eccentricity automatic adjustment system to rapidly adjust the capsule's centre to be aligned with the centreline of the rotary shaft. The capsule is then rotated by a high-precision rotation system, and the laser differential confocal measurement system (LDCS) radially measures the geometrical coordinates of each sampling point position in order to obtain the outer surface profile data of the ICF capsule. The proposed method achieves high-precision, noncontact, automatic, and rapid measurement of the outer surface profile of an ICF capsule. Theoretical analyses and preliminary experiments indicate that for the proposed method the measurement repeatability for the outer surface profile of an ICF capsule can reach 20 nm. (C) 2018 Published by Elsevier Ltd.

引用

页码：333 / 340

页数：8

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