Transmission through optically generated inductive grid arrays

被引：14

作者：

Lockyer, DS ^{[1
]}

Vardaxoglou, JC ^{[1
]}

Kearney, MJ ^{[1
]}

机构：

[1] Loughborough Univ Technol, Dept Elect & Elect Engn, Loughborough LE11 3TU, Leics, England

来源：

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES | 1999年 / 47卷 / 07期

基金：

英国工程与自然科学研究理事会;

关键词：

arrays; frequency selective surfaces; optical control of microwaves;

D O I：

10.1109/22.775484

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A technique is developed for generating pseudo-metallic plasma inductive grid arrays within a semiconductor wafer. The induced plasma elements are defined by a surface impedance which is discussed. Results of an investigation into the transmission properties of a variety of array designs between 16 and 40 GHz are presented. Measurements are performed on a silicon wafer illuminated by an external optical source via a negative image mask.

引用

页码：1391 / 1397

页数：7

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