Investigation of the Influence of Laser Radiation on Material Properties of Transparent Conductive Layers

被引:2
|
作者
Schaefer, Moritz [1 ]
Esser, Alexander [1 ]
Schulz-Ruhtenberg, Malte [1 ]
Holtkamp, Jens [1 ]
Gillner, Arnold [1 ]
机构
[1] Fraunhofer Inst Laser Technol ILT, D-52074 Aachen, Germany
来源
ORGANIC LIGHT EMITTING MATERIALS AND DEVICES XVI | 2012年 / 8476卷
关键词
laser patterning; influence of laser radiation; ITO; PEDOT/PSS; INDIUM-TIN OXIDE; PHOTOELECTRON-SPECTROSCOPY; POLYMER; FILMS;
D O I
10.1117/12.928323
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Organic electronic devices like organic thin film transistors with micron or even sub-micron sized features can be fabricated at high throughput by fast printing methods combined with high resolution laser patterning. In addition, such an approach is of interest for applications with lower requirements in resolution, such as OLEDs or OPV. Due to its high flexibility and adaptability to almost any material or material system, laser processing is a perfect tool for the production of organic electronics. In all the applications above, it is of severe importance not to cause damage to adjacent material or layers by laser radiation. For transparent conductive layers laser-induced damage can lead to changes in conductivity, transparency or material composition (e.g. oxidation). Therefore, a comprehensive study was performed to investigate the influence of laser radiation below ablation threshold on material properties of transparent conducting layers (e.g. ITO, PEDOT/PSS). Samples were irradiated by a large range of wavelengths, reaching from the deep UV (193 nm) up to near IR (1064 nm). To identify changes in material properties the samples were characterized by microscopic methods like high resolution laser scanning microscopy and conductive atomic force microscopy. Also spectroscopic methods like UV/VIS/NIR absorption spectroscopy as well as X-ray photoelectron spectroscopy were used in order to determine changes in conductivity and material composition.
引用
收藏
页数:6
相关论文
共 50 条
  • [11] Analysis of the Influence of Technological Parameters on the Properties of Transparent Conductive Oxides
    Pecherskaya, E. A.
    Zinchenko, T. O.
    Golubkov, P. E.
    Karpanin, O. V.
    Gurin, S. A.
    Novichkov, M. D.
    THEORETICAL FOUNDATIONS OF CHEMICAL ENGINEERING, 2024, 58 (03) : 798 - 806
  • [12] Generation of transparent conductive electrodes by laser consolidation of LIFT printed ITO nanoparticle layers
    M. Baum
    H. Kim
    I. Alexeev
    A. Piqué
    M. Schmidt
    Applied Physics A, 2013, 111 : 799 - 805
  • [13] Generation of transparent conductive electrodes by laser consolidation of LIFT printed ITO nanoparticle layers
    Baum, M.
    Kim, H.
    Alexeev, I.
    Pique, A.
    Schmidt, M.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2013, 111 (03): : 799 - 805
  • [14] Influence of the growth conditions on the transparent conductive properties of ZnO:Al thin films grown by pulsed laser deposition
    Han Jun
    Zhang Peng
    Gong Hai-Bo
    Yang Xiao-Peng
    Qiu Zhi-Wen
    Zi Min
    Cao Bing-Qiang
    ACTA PHYSICA SINICA, 2013, 62 (21)
  • [15] Influence of annealing temperature on microstructures and properties of transparent conductive ZAO films
    Department of Physics, Jinan University, Guangzhou 510632, China
    Zhenkong Kexue yu Jishu Xuebao, 2006, 3 (195-199):
  • [16] Influence of hydrogen plasma on electrical and optical properties of transparent conductive oxides
    Raniero, L
    Gonçalves, A
    Pimentel, A
    Ferreira, I
    Zhang, S
    Pereira, L
    Aguas, H
    Fortunato, E
    Martins, R
    Amorphous and Nanocrystalline Silicon Science and Technology-2005, 2005, 862 : 543 - 548
  • [17] INVESTIGATION OF THE INFLUENCE OF LASER-RADIATION ON PROPERTIES OF GOLD-DOPED SILICON
    VAKHABOV, DA
    ZAKIROV, AS
    IGAMBERDYEV, KT
    KUZIBAEV, K
    MAMADALIMOV, AT
    MAKHKAMOV, S
    KHABIBULLAEV, PK
    SOVIET PHYSICS SEMICONDUCTORS-USSR, 1986, 20 (04): : 472 - 473
  • [18] Transparent conductive thin-film encapsulation layers
    Behrendt, Andreas
    Gahlmann, Tobias
    Trost, Sara
    Polywka, Andreas
    Goerrn, Patrick
    Riedl, Thomas
    ORGANIC PHOTOVOLTAICS XVI, 2015, 9567
  • [19] Structure and properties of transparent conductive doped ZnO films by pulsed laser deposition
    Park, Sang-Moo
    Ikegami, Tomoaki
    Ebihara, Kenji
    Shin, Paik-Kyun
    APPLIED SURFACE SCIENCE, 2006, 253 (03) : 1522 - 1527
  • [20] Investigation on optical and electrical properties of Cu/Au/ITO transparent conductive films
    Qingfeng Sun
    Heping Shi
    Shihui Yu
    Journal of Materials Science: Materials in Electronics, 2022, 33 : 15098 - 15106