Stress determination of micromembranes using laser vibrometry

被引:11
作者
Biswas, A
Weller, T
Katehi, LPB
机构
[1] UNIV S FLORIDA,DEPT ELECT ENGN,MICROWAVE & WIRELESS RES GRP,TAMPA,FL 33620
[2] UNIV MICHIGAN,RADIAT LAB,ANN ARBOR,MI 48109
关键词
D O I
10.1063/1.1146952
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A laser vibrometry based dynamic technique for biaxial residual stress determination in micromembranes is reported. Layered, low pressure chemical vapor deposition grown, rectangular shaped micromembranes are ultrasonically excited. The resulting micromembrane displacement, as a function of frequency and position, is recorded to yield resonance frequencies and associated vibrational mode numbers. The stress is determined from this information. Vibrations forced from ultrasonic pressure (similar to 25 Pa) resulted in peak displacements of tens of nanometers at resonance. For the sample set studied, the (3,1) mode resonance peak displayed the least damping in atmospheric testing and was used to establish stress levels similar to 10(8) N/m(2). A trend for this stress showing an overall decrease by similar to 40% as a result of thermomechanical cycling was identified. (C) 1996 American Institute of Physics.
引用
收藏
页码:1965 / 1969
页数:5
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