Synthesis of diamond-like carbon film on copper and titanium interlayer by vacuum cathode arc evaporation

Using direct-current (DC) and pulsed double-excitation cathode arc plasma technique, diamond-like carbon (DLC) bilayers with nano-scaled interlayer of Cu and Ti were synthesized on silicon substrate. The effect of interlayer on the structure, morphology and mechanical properties of bilayer films were investigated. The change in bilayers structure occurred during interlayer introduction and greatly affected the hardness and internal stress of bilayers. Inter layer nature changed the microstructure of bilayers that in the thickness and element content of diffusion layer. Ti/DLC bilayer exhibited a similarly morphological character to DLC monolayer, whereas Cu interlayer in DLC films leaded to a formation of nanostructured surface and lower root mean square roughness due to the absence of Cu-C bond.