Integrated wireless microfluidic liquid sensors based on low temperature co-fired ceramic (LTCC) technology

被引：6

作者：

He, Tingting ^{[1
]}

Ma, Mingsheng ^{[2
]}

Li, Haogeng ^{[3
]}

Zhang, Faqiang ^{[2
]}

Liu, Feng ^{[2
]}

Liu, Zhifu ^{[2
]}

Li, Xiaogan ^{[1
]}

机构：

[1] Dalian Univ Technol, Sch Microelect, Key Lab Liaoning Integrated Circuits Technol, Dalian 116024, Liaoning, Peoples R China

[2] Chinese Acad Sci, Shanghai Inst Ceram, CAS Key Lab Inorgan Funct Mat & Devices, Shanghai 200050, Peoples R China

[3] Chinese Acad Sci, Shanghai Inst Ceram, CAS Key Lab Inorgan Coatings Mat, Shanghai 200050, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2022年 / 346卷

基金：

中国国家自然科学基金;

关键词：

Wireless sensor; Microfluidic; LTCC; SIW; Complex permittivity;

D O I：

10.1016/j.sna.2022.113840

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A wireless microfluidic sensor based on microwave reflection principle for liquid detection was introduced in this work. The presented sensor comprised a slot antenna and substrate integrated waveguide (SIW) resonator that is integrated with the microchannel using low temperature co-fired ceramic (LTCC) technology. The electromag-netic simulation has been carried out for the sensor structure optimization. The ethanol aqueous solution of 0-50% mole fraction and glucose aqueous solution of 0-600 mg/dL were used for demonstrating the liquid sensing performance of the proposed sensor, respectively. The wireless sensing signal was recorded and analyzed using a network analyzer with a robust interrogation antenna. As the result, the resonant frequency rises in a monotonic and linear manner as the increase of liquid concentrations. The normalized sensitivity of the sensor is 0.29% for deionized water, which is higher than that of the reported liquid sensors based on microwave method. The wireless microfluidic sensor provides a compact, rapid, and real-time monitoring method for liquid, and has wide application prospects in biomedicine and environment area.

引用

页数：8

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