[1] Tokyo Metropolitan Univ, Dept Mech Engn, Hachioji, Tokyo 1920397, Japan
[2] LLC Micro Fabricat Lab, Hachioji, Tokyo 1920046, Japan
[3] Univ Technol Sydney, Sch Elect Mech & Mechatron Syst, Ultimo, NSW 2007, Australia
[4] Univ Wollongong, Sch Mech Mat & Mechatron Engn, Wollongong, NSW 2552, Australia