Thermal Analysis of Multi-Pass Laser Irradiation on Fused Silica

被引：0

作者：

Yao, Peng ^{[1
]}

Huang, Chuanzhen ^{[1
]}

Wang, Jun ^{[1
,2
]}

Kuriyagawa, Tsunemoto ^{[3
]}

机构：

[1] Shandong Univ, Sch Mech Engn, 17923 Jingshi Rd, Jinan 250061, Peoples R China

[2] Univ New South Wales, Sch Mech & Mfg Engn, Sydney, NSW 2052, Australia

[3] Tohoku Univ, Dept Mech Syst & Design, Aoba Ku, Sendai, Miyagi 9808579, Japan

来源：

ADVANCES IN ABRASIVE TECHNOLOGY XV | 2012年 / 565卷

关键词：

CO2 laser irradiation; repair; surface and subsurface micro cracks; fused silica; raster scan; thermal analysis; SIMULATION; DAMAGE; GLASS;

D O I：

10.4028/www.scientific.net/AMR.565.621

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

A rough ground fused silica surface can be ground in a ductile mode by ultra-precision grinding after repairing the surface and subsurface micro cracks (SSMC) by CO2 laser irradiation. In this paper, 2D finite element thermal analysis of unidirectional multi-pass laser irradiation on fused silica was conducted, and the simulation results were compared with the thermal analysis and experiments results of single pass laser irradiation. Thermal analysis results show that the SSMC on the ground fused silica can be repaired and surface roughness can be decreased simultaneously by unidirectinal laser raster scan with a power of 10.5 W, a scan velocity of 0.2 m/s and a scan spacing of 40 mu m.

引用

页码：621 / +

页数：2

共 14 条

[1]

Bergstrom D., 2008, THESIS, P197

[2] Fixed-abrasive grinding of brittle hard-disk substrates [J].

Bifano, TG ;

Bierden, PA .

INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 1997, 37 (07) :935-946

[3]

Bruckner R., 1971, Journal of Non-Crystalline Solids, V5, P177, DOI 10.1016/0022-3093(71)90032-9

[4] A PREDICTION ON THE STRENGTH OF GLASS FOLLOWING THE FORMATION OF SUBSURFACE FLAWS BY SCRIBING [J].

CHENG, W ;

FINNIE, I .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1992, 75 (09) :2565-2572

[5]

Dahotre N.B., 2008, LASER FABRACATION MA

[6] A numerical simulation of machining glass by dual CO2-laser beams [J].

Jiao, Junke ;

Wang, Xinbing .

OPTICS AND LASER TECHNOLOGY, 2008, 40 (02) :297-301

[7] Temperature and stress analysis and simulation in fractal scanning-based laser sintering [J].

Ma, Liang ;

Bin, Hongzan .

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2007, 34 (9-10) :898-903

[8]

McLachlan A.D., 1987, APPL OPTICS, V26, P9

[9] Efficient laser polishing of silica micro-optic components [J].

Nowak, KM ;

Baker, HJ ;

Hall, DR .

APPLIED OPTICS, 2006, 45 (01) :162-171

[10] Optimization of a laser mitigation process in damaged fused silica [J].

Palmier, S. ;

Gallais, L. ;

Commandre, M. ;

Cormont, P. ;

Courchinoux, R. ;

Lamaignere, L. ;

Rullier, J. L. ;

Legros, P. .

APPLIED SURFACE SCIENCE, 2009, 255 (10) :5532-5536

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