Equivalent Circuit Models of Cell and Array for Resonant Cavity-Based Piezoelectric Micromachined Ultrasonic Transducer

被引：21

作者：

Xu, Tingzhong ^{[1
,2
]}

Zhao, Libo ^{[1
]}

Jiang, Zhuangde ^{[1
]}

Guo, Shuaishuai ^{[1
]}

Li, Zhikang ^{[1
]}

Yang, Ping ^{[1
]}

Luo, Guoxi ^{[1
]}

Sun, Lin ^{[1
]}

Zhang, Liangchi ^{[2
]}

机构：

[1] Xi An Jiao Tong Univ, Int Joint Lab Micro Nano Mfg & Measurement Techno, Collaborat Innovat Ctr Suzhou Nano Sci & Technol, State Key Lab Mfg Syst Engn,Sch Mech Engn, Xian 710049, Peoples R China

[2] Univ New South Wales, Sch Mech & Mfg Engn, Kensington, NSW 2052, Australia

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2020年 / 67卷 / 10期

基金：

中国国家自然科学基金; 澳大利亚研究理事会;

关键词：

Acoustics; Cavity resonators; Neck; Liquids; Integrated circuit modeling; Electron tubes; Ultrasonic transducers; Array; high emission performance; liquid amplification effect; piezoelectric micromachined ultrasonic transducers (PMUTs); resonant cavity; THEORETICAL-MODEL; SOUND;

D O I：

10.1109/TUFFC.2020.2993805

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

This article presents a design of resonant cavity-based piezoelectric micromachined ultrasonic transducers (PMUTs), including impedance matching tube-integrated (T) and Helmholtz resonant (HR) cavity-integrated PMUTs. In addition, equivalent circuit models for single PMUT cell and PMUT array are developed for structural optimization and complex array design. The model-derived results agree well with the FEM results. On the basis of the proposed models, an optimized design is established to achieve high output pressure and a good array working performance. The working performance of arrays that consist of HR-PMUTs and traditional circular diaphragm PMUTs (C-PMUTs) is compared. Results indicate that the HR-PMUT array has a lower crosstalk effect than the traditional C-PMUT array. Furthermore, the highest ultrasonic output pressure of HR-PMUT array at the resonant frequency can be achieved with an increase of up to 163% compared with that of the C-PMUT array because of the liquid amplification effect. Also, the cavity-based design and its model can be used for further advanced PMUT cell structures in other arrays to improve their performance.

引用

页码：2103 / 2118

页数：16