Nano-scale interfacial friction behavior between two kinds of materials in MEMS based on molecular dynamics simulations

被引：0
|
作者：
Yang Ping [1 ]
Liao Linbo
Ding Jianning
Yang Jichang
Li Changsheng
Fan Zen
Lin Zhiyong
机构：
[1] Jiangsu Univ, Res Ctr Micro Nano Sci & Technol, Zhenjiang 212013, Peoples R China
[2] Guilin Inst Elect Technol, Res Ctr Adv Design & Mfg, Guilin 541004, Peoples R China
来源：
JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION | 2006年 / 21卷 / 04期
关键词：
molecular dynamics simulation; interfacial friction; nano-scale friction; MEMS;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The aim of this article was to provide a systematic method to perform molecular dynamics simulation or evaluation for nano-scale interfacial fiction behavior between two kinds of materials in MEMS design. Friction is an important factor affecting the performance and reliability of MEMS. The model of the nano-scale interfacial friction behavior between two kinds of materials was presented based on the Newton's equations of motion. The Morse potential function was selected for the model. The improved Verlet algorithm was employed to resolve the model, the atom trajectories and the law of the interfacial function behavior. Comparisons with experimental data in other paper confirm the validity of the model. Using the model it is possible to simulate or evaluate the importance of different factors for designing of the nano-scale interfacial friction behavior between two kinds of materials in MEMS.
引用
收藏
页码：173 / 176
页数：4
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